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Method of making a light modulating display device and associated transistor circuitry and structures thereof

  • US 7,830,588 B2
  • Filed: 02/09/2009
  • Issued: 11/09/2010
  • Est. Priority Date: 12/19/1996
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing a display device, comprising:

  • forming at least one interferometric modulator over a substrate, each interferometric modulator comprising a first mirror formed over the substrate and a second mirror separated by a spacing from the first mirror; and

    forming at least one transistor circuit on the substrate,wherein forming the at least one interferometric modulator and the at least one transistor circuit comprises depositing at least one layer of material to form a portion of the at least one interferometric modulator and a portion of the at least one transistor circuit.

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