Intelligent condition-monitoring and fault diagnostic system for predictive maintenance
First Claim
Patent Images
1. A system for condition monitoring and fault diagnosis comprising:
- a first controller having a processor configured to perform a data collection function that acquires time histories of selected variables for one or more of the components according to specified sampling parameters;
a second controller having a processor configured to perform a pre-processing function that calculates specified characteristics of each of the time histories individually;
a third controller having a processor configured to perform an analysis function for evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and
a fourth controller having a processor configured to perform a reasoning function for determining the condition of the one or more components from the one or more hypotheses;
wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present.
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Abstract
A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
261 Citations
209 Claims
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1. A system for condition monitoring and fault diagnosis comprising:
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a first controller having a processor configured to perform a data collection function that acquires time histories of selected variables for one or more of the components according to specified sampling parameters; a second controller having a processor configured to perform a pre-processing function that calculates specified characteristics of each of the time histories individually; a third controller having a processor configured to perform an analysis function for evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and a fourth controller having a processor configured to perform a reasoning function for determining the condition of the one or more components from the one or more hypotheses; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of component condition monitoring and fault diagnosis comprising:
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acquiring time histories of selected variables for one or more of the components according to specified sampling parameters; calculating specified characteristics of each of the time histories individually; evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; determining the condition of the one or more components from the one or more hypotheses; and utilizing the determined condition of the one or more components to determine if preventative maintenance or service is required for the components; wherein multiple instances of processors configured to perform acquiring time histories, calculating specified characteristics, evaluating the specified characteristics, determining the condition of the one or more components and utilizing the determined condition reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A computer readable storage medium encoded with a computer program for component condition monitoring and fault diagnosis, that when run on a computer causes the computer to:
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acquire time histories of selected variables for one or more of the components according to specified sampling parameters; calculate specified characteristics of each of the time histories individually; evaluate the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; determine the condition of the one or more components from the one or more hypotheses, and utilize the determined condition of the one or more components to determine if preventative maintenance or service is required for the components. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A system for component condition monitoring and fault diagnosis comprising:
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a first controller having a processor configured to perform a data collection function that acquires time histories of selected variables for one or more components according to specified sampling parameters; a second controller having a processor configured to perform a pre-processing function that calculates specified characteristics of each of the time histories individually; a third controller having a processor configured to perform an analysis function for evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; a fourth controller having a processor configured to perform a reasoning function for determining the condition of the one or more components from the one or more hypotheses; and a fifth controller having a processor configured to perform a manager function that determines the selected variables acquired by the data collection function, triggers data processing in the pre-processing function for calculating the specified characteristics, initiates evaluation of the characteristics by the analysis function to yield the hypotheses, and triggers derivation of the component conditions by the reasoning function; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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30. A system for monitoring component conditions of a semiconductor production tool comprising:
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a component controller including a processor having a data collection function that acquires time histories of selected variables of one or more of the components according to specified sampling parameters; a mechatronic device controller including a processor having a pre-processing function that calculates specified characteristics of each of the time histories individually for those of the one or more components operating together as a mechatronic device; a group controller for a group of mechatronic devices, the group controller including a processor with an analysis function for evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; a system controller including a processor having a reasoning function for determining the condition of the one or more components from the one or more hypotheses, and a manager function that determines the selected variables acquired by the data collection function, triggers data processing in the pre-processing function for calculating the specified characteristics, initiates evaluation of the characteristics by the analysis function to yield the hypotheses, and triggers derivation of the component conditions by the reasoning function; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (31, 32, 33, 34, 35, 36)
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37. A continuous health monitoring system comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of one or more component energy dissipation values during component operations according to specified sampling parameters; a second controller including a processor configured to perform a pre-processing function that computes metrics using an operational energy dissipation from each of the time histories individually and a baseline energy dissipation; a third controller including a processor configured to perform an analysis function for evaluating whether the computed metrics exceed predetermined threshold values to produce one or more hypotheses of a condition of the one or more components; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the one or more components from the one or more hypotheses, wherein the data collection, pre-processing, and analysis functions operate in parallel with the component operations and multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45)
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46. A method of continuously monitoring system health comprising:
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acquiring time histories of one or more component energy dissipation values during component operations according to specified sampling parameters; computing metrics during the component operations using an operational energy dissipation from each of the time histories individually and a baseline energy dissipation; in parallel with the component operations, evaluating whether the computed metrics exceed predetermined threshold values to produce one or more hypotheses of a condition of the one or more components; determining the condition of the one or more components from the one or more hypotheses; and utilizing the determined condition of the one or more components to determine if preventative maintenance or service is required for the components; wherein multiple instances of processors configured to perform acquiring time histories, computing metrics, evaluating the computed metrics, determining the condition of the one or more components and utilizing the determined condition reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (47, 48, 49, 50, 51, 52, 53, 54)
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55. A continuous health monitoring system comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of one or more values related to power consumption by a component during operation according to specified sampling parameters; a second controller including a processor configured to perform a pre-processing function that computes metrics using an operational power consumption from each of the time histories individually and a power consumption baseline; a third controller including a processor configured to perform an analysis function for evaluating whether the computed metrics exceed predetermined threshold values to produce one or more hypotheses of a condition of the component; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the component from the one or more hypotheses, wherein the data collection, pre-processing, and analysis functions operate in parallel with the component operations and multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (56, 57, 58, 59, 60, 61, 62)
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63. A method of continuously monitoring system health comprising:
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acquiring time histories of one or more power consumption related values of a component during operation according to specified sampling parameters; computing metrics during the component operations using an operational power consumption from each of the time histories individually and a power consumption baseline; in parallel with the component operations, evaluating whether the computed metrics exceed predetermined threshold values to produce one or more hypotheses of a condition of the component; determining the condition of the component from the one or more hypotheses; and utilizing the determined condition of the component to determine if preventative maintenance or service is required for the component; wherein multiple instances of processors configured to perform acquiring time histories, computing metrics, evaluating the computed metrics, determining the condition of the component and utilizing the determined condition of the component reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (64, 65, 66, 67, 68, 69, 70)
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71. A continuous health monitoring system comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of one or more variables of a vacuum component related to operation of a vacuum device during component operations according to specified sampling parameters; a second controller including a processor configured to perform a pre-processing function that calculates specific characteristics of each of the time histories individually; a third controller including a processor configured to perform an analysis function for evaluating the characteristics of each of the individual time histories to produce one or more hypotheses about a condition of the vacuum component; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the vacuum component from the one or more hypotheses, wherein the data collection, pre-processing, and analysis functions operate in parallel with the component operations and multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86)
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87. A method of continuously monitoring system health comprising:
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acquiring time histories of one or more variables of a vacuum component related to operation of a vacuum device according to specified sampling parameters during component operations; calculating specific characteristics of each of the time histories individually during the component operations; in parallel with the component operations, evaluating the characteristics to produce one or more hypotheses about a condition of the vacuum component; and determining the condition of the vacuum component from the one or more hypotheses utilizing the determined condition of the vacuum component to determine if preventative maintenance or service is required for the vacuum component; wherein multiple instances of processors configured to perform acquiring time histories, calculating specific characteristics of each of the time histories, evaluating the characteristics, determining the condition of the vacuum component and utilizing the determined condition of the vacuum component reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102)
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103. A continuous health monitoring system comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories according to specified sampling parameters in the form of video data related to operations of a device; a second controller including a processor configured to perform a pre-processing function that calculates specific characteristics of each of the time histories individually; a third controller including a processor configured to perform an analysis function for evaluating the characteristics of each of the individual time histories to produce one or more hypotheses about a condition of the device; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the device from the one or more hypotheses, wherein the data collection, pre-processing, and analysis functions operate in parallel with the device operations and multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (104, 105, 106, 107, 108, 109, 110, 111, 112, 113)
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114. A method of continuously monitoring system health comprising:
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acquiring time histories according to specified sampling parameters in the form of video data related to operations of a device while the device is operating; calculating specific characteristics of each of the time histories individually while the device is operating; evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses about a condition of the device while the device is operating; determining the condition of the device from the one or more hypotheses; and utilizing the determined condition of the device to determine if preventative maintenance or service is required, for the device; wherein multiple instances of processors configured to perform acquiring time histories, calculating specific characteristics of each of the time histories, evaluating the specified characteristics, determining the condition of the device and utilizing the determined condition of the device reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (115, 116, 117, 118, 119, 120, 121, 122, 123)
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124. A continuous health monitoring system comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of selected variables for one or more components according to specified sampling parameters during component operations including a difference between a predicted torque and a measured torque of the one or more components; a second controller including a processor configured to perform a pre-processing function that calculates specified characteristics of each of the time histories individually; a third controller including a processor configured to perform an analysis function for evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the one or more components from the one or more hypotheses, wherein the data collection, pre-processing, and analysis functions operate in parallel with the component operations and multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152)
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153. A system for automatic fault diagnosis comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories according to specified sampling parameters of selected power consumption related values for one or more of components of a device in response to deterioration in the operation of the device; a second controller including a processor configured to perform a pre-processing function that calculates specified characteristics of each of the time histories individually including a range and a minimum variance and requests additional time history acquisition if certain thresholds are not met for the range and minimum variance; a third controller including a processor configured to perform an analysis function for evaluating the characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and a fourth controller including a processor configured to perform a reasoning function for determining faults of the one or more components or of the device from the one or more hypotheses; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (154, 155, 156)
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157. A method for automatic fault diagnosis comprising:
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acquiring time histories of selected power consumption related values according to specified sampling parameters for one or more components of a device in response to deterioration in the operation of the device; calculating specified characteristics of each of the time histories individually including a range and a minimum variance and requests additional time history acquisition if certain thresholds are not met for the range and minimum variance; evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and determining faults of the one or more components or of the device from the one or more hypotheses; and utilizing the determined condition of the one or more components or the device to determine if preventative maintenance or service is required for the components or the device; wherein multiple instances of processors configured to perform acquiring time histories, calculating specified characteristics of each of the time histories, evaluating the specified characteristics, determining faults and utilizing the determined condition reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (158, 159, 160)
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161. A system for automatic fault diagnosis comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of selected variables according to specified sampling parameters for one or more of components of a device in response to deterioration in the operation of the device; a second controller including a processor configured to perform a pre-processing function that calculates specified characteristics of each of the time histories individually; a third controller including a processor configured to perform an analysis function for evaluating the specified characteristics of each of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and a fourth controller including a processor configured to perform a reasoning function for determining faults of the one or more components or of the device from the one or more hypotheses; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (162, 163, 164, 165, 166, 167, 168, 169, 170)
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171. A system for on-demand fault diagnosis comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of motor excitations and responses of an encoder for a motor of a device on an on-demand basis according to specified sampling parameters; a second controller including a processor configured to perform a pre-processing function that calculates a frequency response of the device from each of the time histories; a third controller including a processor configured to perform an analysis function for identifying frequencies from the frequency response corresponding to transverse belt vibrations of a belt drive driven by the motor; and a fourth controller including a processor configured to perform a reasoning function for comparing the identified frequencies with an allowable range for the belt drive to determine the condition of the belt drive; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present.
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172. A method for diagnosing faults on demand comprising:
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acquiring time histories of motor excitations and responses of an encoder for a motor of a device on an on-demand basis according to specified sampling parameters; calculating a frequency response of the device from each of the time histories individually; identifying frequencies from the frequency response corresponding to transverse belt vibrations of a belt drive driven by the motor; comparing the identified frequencies with an allowable range for the belt drive to determine the condition of the belt drive; and utilizing the determined condition of the belt drive to determine if preventative maintenance or service is required for the belt drive; wherein multiple instances of processors configured to perform acquiring time histories, calculating a frequency response, identifying frequencies, comparing the identified frequencies and utilizing the determined condition reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present.
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173. A system for on-demand fault diagnosis comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of one or more variables of a vacuum component of a vacuum device on an on-demand basis according to specified sampling parameters; a second controller including a processor configured to perform a pre-processing function that calculates specific characteristics of each of the time histories individually; a third controller including a processor configured to perform an analysis function for evaluating the specified characteristics of the individual time histories to produce one or more hypotheses about a condition of the vacuum component; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the vacuum component from the one or more hypotheses; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (174, 175, 176, 177, 178, 179)
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180. A method of continuously monitoring system health comprising:
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acquiring time histories of one or more variables of a vacuum component of a vacuum device on an on-demand basis according to specified sampling parameters; calculating specific characteristics of each of the time histories; evaluating the specified characteristics of the individual time histories to produce one or more hypotheses about a condition of the vacuum component; determining the condition of the vacuum component from the one or more hypotheses; and utilizing the determined condition of the vacuum component to determine if preventative maintenance or service is required for the vacuum component; wherein multiple instances of processors configured to perform acquiring time histories, calculating specific characteristics of each of the time histories, evaluating the specified characteristics, determining the condition of the vacuum component and utilizing the determined condition of the vacuum component reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (181, 182, 183, 184, 185, 186)
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187. A system for on-demand fault diagnosis comprising:
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a first controller including a processor configured to perform a data collection function that acquires time histories of one or more variables related to a component of a device on an on-demand basis according to specified sampling parameters; a second controller including a processor configured to perform a pre-processing function that calculates specific characteristics of each of the time histories; a third controller including a processor configured to perform an analysis function for evaluating the specified characteristics of the individual time histories to produce one or more hypotheses about a condition of the component of the device; and a fourth controller including a processor configured to perform a reasoning function for determining the condition of the component from the one or more hypotheses; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present. - View Dependent Claims (188, 189, 190, 191, 192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208)
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209. A hierarchical system for monitoring component conditions of a machine comprising:
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a component controller including a processor having a data collection function that acquires time histories of selected variables of one or more components of the machine according to specified sampling parameters; a device controller including a processor having a pre-processing function that calculates specified characteristics of each of the time histories for a plurality of the component controllers operating together; a subsystem controller for a group of the device controllers, the subsystem controller including a processor having an analysis function for evaluating the specified characteristics of the individual time histories to produce one or more hypotheses of a condition of the one or more components; and a system controller including a processor having a reasoning function for determining the condition of the one or more components from the one or more hypotheses, and having a manager function that determines the selected variables acquired by the data collection function, triggers data processing in the pre-processing function for calculating the specified characteristics, initiates evaluation of the characteristics by the analysis function to yield the hypotheses, and triggers derivation of the component conditions by the reasoning function; wherein multiple instances of each function reside in progressively higher level controllers within a machine being monitored such that data required for health monitoring and fault diagnostic purposes are used at the level where intelligence to process that data is present.
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Specification