Micromirror device with a single address electrode

• US 7,907,320 B2
• Filed: 02/25/2008
• Issued: 03/15/2011
• Est. Priority Date: 02/26/2007
• Status: Expired due to Fees

• Current Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Arai, Kazuma, Nishino, Hirokazu, Maeda, Yoshihiro, Ishii, Fusao
• Primary Examiner(s): Cherry; Euncha P
• Application Number:
  US12/072,450
• Publication Number:
  US 20080204845A1
• Time in Patent Office: 1,114 Days
• Field of Search: 3592231-2261
• US Class Current: 359/224.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable, an address electrode having first and second regions arranged across the deflection axis of each mirror, a driving circuit for controlling a deflection of the mirror, and a stopper provided in a position of making contact with the mirror in a deflected state of the mirror. When the mirror makes contact with the stopper, the potential of the mirror or the stopper changes.

Claims

1. A micromirror device, comprising:

a plurality of mirrors each supported on an elastic hinge disposed on a substrate for deflecting each of the mirrors to different deflection angles;

an electrode disposed on the substrate and connected to a driving circuit wherein said driving circuit applies a voltage to said electrode to deflect said mirror to said different deflection angles; and

a stopper is disposed on said substrate at a position for contacting and stopping said mirror when said mirror is deflected to a maximum deflection angle, and wherein said driving circuit changes a potential of said mirror or said stopper when said mirror is deflected to said maximum deflection angle and contacts with said stopper.

2. The micromirror device according to claim 1, wherein

said driving circuit is further electrically connected to said mirrors via said elastic hinge.

3. The micromirror device according to claim 1, wherein

each of said mirrors further has a plurality of said electrodes connected to said drive circuit for driving and deflecting each of said mirrors.

4. The micromirror device according to claim 1, wherein

said elastic hinge is composed of a material having a predetermined resistance.

5. The micromirror device according to claim 1, wherein

said stopper is composed of a first material and said mirror is composed of a second material wherein when said mirror is deflected to said maximum deflecting angle to contact said stopper thus having a predetermined resistance between said stopper and said mirror.

6. The micromirror device according to claim 1, wherein

said drive circuit controls said mirror and said electrode to decrease a coulomb force between said mirror and said electrode when said mirror contacts with said stopper.

7. A micromirror device, comprising:

a plurality of mirrors each supported on an elastic hinge disposed on a substrate for deflecting each of the mirrors to different deflection angles;

an electrode disposed on the substrate and connected to a driving circuit wherein said electrode is disposed at a position on said substrate for contacting and stopping said mirror when said mirror is deflected to a maximum deflection angle, and

said driving circuit changes a potential of said mirror when said mirror is deflected to said maximum deflection angle and contacts with said electrode.

8. The micromirror device according to claim 7, wherein

said driving circuit is further electrically connected to said mirrors via said elastic hinge.

9. The micromirror device according to claim 7, wherein

each of said mirrors further has a plurality of said electrodes connected to said drive circuit for deflecting and stopping each of said mirrors.

10. The micromirror device according to claim 7, wherein

said driving circuit deflects said mirror to contact with said electrode when said mirror is deflected to a nearly horizontal deflection angle substantially in parallel to said substrate.

11. The micromirror device according to claim 7, wherein

said mirror is composed of a conductive material for transferring electric charges between said mirror said electrode when said mirror is deflected to contact and stopped by the electrode.

12. The micromirror device according to claim 7, wherein

said driving circuit changes a coulomb force applied between said mirrors and said electrode while the mirror is moving toward the electrode.

13. A micromirror device, comprising:

a plurality of mirrors each supported on an elastic hinge disposed on a substrate for deflecting each of the mirrors to different deflection angles;

an address electrode disposed on the substrate for each of said mirrors;

a driving circuit connected to at least one of said address electrodes, and to said mirror via said elastic hinge;

a potential change electrode disposed on the substrate for each of said mirrors, wherein said potential change electrode is disposed at a position on said substrate for contacting and stopping said mirror when said mirror is deflected to a maximum deflection angle; and

said driving circuit changes a potential of at least one of said potential change electrodes and said mirror, and said address electrode in one of said mirrors of said potential change electrode when said mirror makes contact with said potential change electrode.