Interconnect structure for MEMS device
First Claim
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1. An interferometric display device, comprising:
- a transmissive substrate;
a plurality of individually addressable interferometric light modulators on the substrate, each modulator comprisinga first electrode;
a second electrode;
a conductive connector connected to the first electrode and configured to connect to an external device to control said modulator through said connector;
at least one of a diode, a transistor, and a zener diode, wherein each of the at least one diode, a transistor, and a zener diode is connected to the first electrode and the connector and disposed therebetween; and
a cavity between the first and second electrode, wherein the cavity is configured to interferometrically modulate incident light transmitted through the substrate, and wherein the cavity has a variable height dependent on a voltage potential applied between the first and second electrodes.
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Abstract
An interferometric modulator array is formed with connectors and/or an encapsulation layer with electrical connections. The encapsulation layer hermetically seals the array. Circuitry may also be formed over the array.
475 Citations
21 Claims
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1. An interferometric display device, comprising:
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a transmissive substrate; a plurality of individually addressable interferometric light modulators on the substrate, each modulator comprising a first electrode; a second electrode; a conductive connector connected to the first electrode and configured to connect to an external device to control said modulator through said connector; at least one of a diode, a transistor, and a zener diode, wherein each of the at least one diode, a transistor, and a zener diode is connected to the first electrode and the connector and disposed therebetween; and a cavity between the first and second electrode, wherein the cavity is configured to interferometrically modulate incident light transmitted through the substrate, and wherein the cavity has a variable height dependent on a voltage potential applied between the first and second electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 18, 20)
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15. A device comprising:
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a substrate; a plurality of individually addressable means for interferometrically modulating incident light on the substrate, each modulating means comprising a first electrode; and a second electrode; conductive connecting means for connecting a single one of the modulating means to an external device so that each single one of the plurality of modulating means is individually controllable by the external device through said connector; at least one of a diode, a transistor, and a zener diode, wherein each of the at least one diode, a transistor, and a zener diode connected to the first electrode and the connecting means and disposed therebetween; and a cavity between the first and second electrode, wherein the cavity is configured to interferometricall modulate incident light transmitted through the substrate, and wherein the cavity has a variable height dependent on a voltage potential applied between the first and second electrodes. - View Dependent Claims (16, 17, 19, 21)
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Specification