Apparatus and method for reducing slippage between structures in an interferometric modulator

• US 7,948,671 B2
• Filed: 12/04/2009
• Issued: 05/24/2011
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Floyd, Philip Don, Arbuckle, Brian W., Cummings, William, Tung, Ming-Hau
• Primary Examiner(s): Schwartz; Jordan M.
• Assistant Examiner(s): Jones; James C
• Application Number:
  US12/631,194
• Publication Number:
  US 20100080890A1
• Time in Patent Office: 536 Days
• Field of Search: 359/290, 359/291
• US Class Current: 359/290
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A support structure within an interferometric modulator device may contact various other structures within the device. Increased bond strengths between the support structure and the other structures may be achieved in various ways, such as by providing roughened surfaces and/or adhesive materials at the interfaces between the support structures and the other structures. In an embodiment, increased adhesion is achieved between a support structure and a substrate layer. In another embodiment, increased adhesion is achieved between a support structure and a moveable layer. Increased adhesion may reduce undesirable slippage between the support structures and the other structures to which they are attached within the interferometric modulator.

Claims

1. A method of making an electromechanical device, the method comprising:

forming a substrate layer, the substrate layer comprising a first reflective surface;

etching at least a portion of a support region of the substrate layer to form a roughened support region; and

forming a support structure on the roughened support region of the substrate layer;

the roughened support region being configured to increase adhesion between the substrate layer and the support structure.

2. The method of claim 1, wherein the etching comprises etching a portion of the first reflective surface.

3. The method of claim 1, further comprising depositing an adhesive over at least a portion of the roughened support region of the substrate layer.

4. The method of claim 3, wherein the adhesive comprises aluminum.

5. The method of claim 1, further comprising depositing a sacrificial layer over the substrate layer.

6. The method of claim 5, further comprising depositing a second reflective layer over the sacrificial layer.

7. The method of claim 6, further comprising removing the sacrificial layer to form a cavity positioned between the first reflective layer and the second reflective layer.

8. The method of claim 1, wherein the substrate layer comprises a transparent substrate.

9. An electromechanical device made by the method of claim 1.

10. A method of making an electromechanical device, comprising:

forming a substrate layer;

forming a support structure on the substrate layer;

etching at least a portion of the support structure to form a roughened portion of the support structure; and

forming a movable layer on the treated roughened portion of the support structure, wherein the roughened portion of the support structure is configured to increase adhesion between the support structure and the movable layer.

11. The method of claim 10, further comprising depositing an adhesive over at least a portion of the roughened portion of the support structure.

12. The method of claim 11, wherein the adhesive comprises aluminum.

13. The method of claim 10, wherein the substrate layer comprises a transparent substrate.

14. The method of claim 10, further comprising forming a reflective layer on the substrate layer.

15. The method of claim 14, further comprising depositing a sacrificial layer over the reflective layer.

16. The method of claim 15, further comprising removing the sacrificial layer to form a cavity positioned between the reflective layer and the moveable layer.

17. An electromechanical device made by the method of claim 10.