Radiant energy imager using null switching
First Claim
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1. A repulsive cantilever assembly comprising:
- a cantilever having a conductive surface adapted to conduct electrical charges, the cantilever anchored at a first end and suspended at a second end;
a first electrode positioned opposite to and spaced apart from the cantilever conductive surface, the first electrode configured to receive electrical charges of a first polarity, conduct electrical charges and be electrically coupled with the cantilever surface; and
a second electrode spaced apart from the first electrode and configured to receive electrical charges of a second polarity, wherein the cantilever is repulsed from the first electrode when said electrical charges are applied.
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Abstract
In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described.
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Citations
80 Claims
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1. A repulsive cantilever assembly comprising:
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a cantilever having a conductive surface adapted to conduct electrical charges, the cantilever anchored at a first end and suspended at a second end; a first electrode positioned opposite to and spaced apart from the cantilever conductive surface, the first electrode configured to receive electrical charges of a first polarity, conduct electrical charges and be electrically coupled with the cantilever surface; and a second electrode spaced apart from the first electrode and configured to receive electrical charges of a second polarity, wherein the cantilever is repulsed from the first electrode when said electrical charges are applied. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A sensor for measuring an influence, comprising:
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a substrate; a first element coupled to the substrate at a first end of the first element, a second end of the first element extending over the substrate to form a gap; a first electrode positioned proximate to the gap and in electrical communication with the first element; and a second electrode positioned proximate to the first electrode, the first and second electrodes adapted to generate an electrostatic force responsive to a voltage applied to the first and second electrodes, wherein the second end is configured to be displaced in response to the electrostatic force, the second end displaced by an influence that comprises at least one of irradiation, heated air, temperature, acceleration, and mass. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An irradiance sensor comprising:
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a surface electrode; a first switch terminal; a cantilever electrically connected to the surface electrode, the cantilever having a first end including a second switch terminal, the second switch terminal configured to contact the first switch terminal at a predetermined position; and an encapsulated electrode wherein an electrostatic force is generated when a voltage is applied between the encapsulated electrode and the surface electrode, wherein the position of the first end of the cantilever is responsive to the electrostatic force. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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59. A system for recording an image of an irradiation pattern, comprising:
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a voltage source; and a plurality of sensors, each sensor comprising, a cantilever anchored at a first end and forming a gap at a second end, the position of the second end of the cantilever configured to change in response to irradiation exposure, a pair of electrodes, wherein a first electrode of the pair of electrodes is electrically coupled to the cantilever, the voltage source configured to apply a voltage across the pair of electrodes, wherein the electrodes generate an electrostatic force configured to change the position of the second end of the cantilever, and a switch having a first terminal and a second terminal, the first terminal coupled to the cantilever, wherein the switch changes state when the position of the second end of the cantilever changes from a predetermined position; and a sensing circuit for sensing state signals from the plurality of sensors. - View Dependent Claims (60, 61, 62, 63, 64, 65)
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66. A method for measuring an influence, comprising:
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configuring a portion of a cantilever to change position in a first direction in response to an exposure to an influence; applying an electrical voltage to a pair of electrodes to generate an electrostatic force on the cantilever, wherein the electrostatic force is in a second direction which differs from the first direction; and detecting when the portion of the cantilever is at a predetermined position in response to influence exposure. - View Dependent Claims (67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80)
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Specification