Conductive bus structure for interferometric modulator array
First Claim
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1. A device comprising:
- a substrate;
a first electrode layer over the substrate, the first electrode layer having a first electrical resistance;
a second electrode layer over the substrate, the second electrode layer having a second electrical resistance;
a movable layer; and
a conductive bus layer having a third electrical resistance lower than the first electrical resistance or the second electrical resistance, at least a portion of the conductive bus layer electrically coupled to at least one of the first electrode layer and the second electrode layer.
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Abstract
Embodiments of an interferometric modulator are disclosed having various enhancements and features including a conductive bus. In certain embodiments, the interferometric modulator has a first conductive layer suspended over a second electrode layer. In certain embodiments, a second conductive layer is provided over the first conductive layer. One of the first and/or second conductive buses may further connect to the first electrode layer and/or the second electrode layer. Other disclosed features can be incorporated into embodiments of the interferometric modulator to improve response time, power consumption, and image resolution.
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Citations
22 Claims
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1. A device comprising:
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a substrate; a first electrode layer over the substrate, the first electrode layer having a first electrical resistance; a second electrode layer over the substrate, the second electrode layer having a second electrical resistance; a movable layer; and a conductive bus layer having a third electrical resistance lower than the first electrical resistance or the second electrical resistance, at least a portion of the conductive bus layer electrically coupled to at least one of the first electrode layer and the second electrode layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A device comprising:
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means for supporting at least a portion of the device; first means for conducting electricity over the supporting means, the first conducting means having a first electrical resistance; second means for conducting electricity over the supporting means, the second conducting means having a second electrical resistance; means for moving at least a portion of the device; and third means for conducting electricity, the third conducting means having a third electrical resistance lower than the first electrical resistance or the second electrical resistance, at least a portion of the third conducting means electrically coupled to at least one of the first conducting means and the second conducting means. - View Dependent Claims (15, 16, 17, 18)
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19. A device comprising:
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a plurality of structures, each structure comprising a first electrode layer having a first electrical resistance and a first electrical conductance, a second electrode layer having a second electrical resistance and a second electrical conductance, and a surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the first electrode layer and the second electrode layer having a region therebetween, the surface responsive to a voltage applied to at least one of the first electrode layer and the second electrode layer by moving within the region along a direction substantially perpendicular to the surface; and a conductive bus layer interconnecting the plurality of structures, at least a portion of the conductive bus layer electrically coupled to the first electrode layers or the second electrode layers of the plurality of structures, wherein the conductive bus layer is configured to reduce a resistance-capacitance time constant between a driver and the device as compared to a device having serially connected electrode layers. - View Dependent Claims (20, 21)
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22. A device comprising:
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a plurality of optical modulators, each optical modulator comprising a first electrode layer, a second electrode layer, and a reflective surface substantially parallel to the first electrode layer and coupled to the second electrode layer, the first electrode layer and the second electrode layer having a region therebetween, the reflective surface responsive to a voltage applied to at least one of the first electrode layer and the second electrode layer by moving within the region along a direction substantially perpendicular to the reflective surface; and a conductive bus layer interconnecting the plurality of optical modulators, at least a portion of the conductive bus layer electrically coupled to the first electrode layers or the second electrode layers of the plurality of optical modulators, wherein the conductive bus layer is configured to avoid interference with an optical performance of the device.
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Specification