Dual mode sensing for vibratory gyroscope
First Claim
Patent Images
1. An angular rate sensor comprisinga substrate;
- a drive subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;
wherein the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis; and
Coriolis force acting on the drive subsystem along a second axis in response to angular velocity of the substrate around a third axis;
a sense subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;
wherein the sense subsystem moves along or around a fourth axis; and
motion of the sense subsystem can be sensed by a transducer and is proportional to the angular velocity of the substrate about the third axis; and
at least one flexible coupling between the drive subsystem and the sense subsystem, wherein the flexible coupling couples a drive subsystem motion in the second axis to the sense subsystem motion about the fourth axis, wherein the flexible coupling causes two resonant modes allowing both in-phase and anti-phase motion between the sensor subsystem and the drive subsystem.
1 Assignment
0 Petitions
Accused Products
Abstract
An angular rate sensor is disclosed. The angular rate sensor comprises a substrate and a drive subsystem partially supported by a substrate. The drive subsystem includes at least one spring, at least one anchor, and at least one mass; the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis. Coriolis force acts on moving the drive subsystem along or around a second axis in response to angular velocity of the substrate around the third axis. The angular rate sensor also includes a sense subsystem partially supported by a substrate. The sense subsystem includes at least one spring, at least one anchor, and at least one mass.
231 Citations
7 Claims
-
1. An angular rate sensor comprising
a substrate; -
a drive subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;
wherein the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis; and
Coriolis force acting on the drive subsystem along a second axis in response to angular velocity of the substrate around a third axis;a sense subsystem partially supported by the substrate with at least one spring, at least one anchor; and
at least one mass;
wherein the sense subsystem moves along or around a fourth axis; and
motion of the sense subsystem can be sensed by a transducer and is proportional to the angular velocity of the substrate about the third axis; andat least one flexible coupling between the drive subsystem and the sense subsystem, wherein the flexible coupling couples a drive subsystem motion in the second axis to the sense subsystem motion about the fourth axis, wherein the flexible coupling causes two resonant modes allowing both in-phase and anti-phase motion between the sensor subsystem and the drive subsystem. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
Specification