Apparatus and method for testing a panel of interferometric modulators
First Claim
1. A method of testing a panel comprising a plurality of interferometric modulators, the method comprising:
- applying a ramped voltage waveform to the plurality of interferometric modulators of the panel; and
in response to applying the ramped voltage, identifying a first voltage of the ramped voltage waveform at which a first threshold number of the plurality of interferometric modulators of the panel enter a stiction state, wherein with respect to an interferometric modulator that enters the stiction state, a first portion of the interferometric modulator adheres to a second portion of the interferometric modulator.
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Accused Products
Abstract
In some embodiments, each interferometric modulator has a stiction threshold voltage. If a voltage above the stiction threshold voltage is applied to the interferometric modulator, the interferometric modulator enters a stiction state permanently, i.e., becomes “stuck,” and the interferometric modulator becomes inoperable. Disclosed are apparatuses, methods and computer-readable media for testing a panel of interferometric modulators. A ramped voltage waveform is applied to a plurality of interferometric modulators of the panel. In response to applying the ramped voltage, the stiction threshold voltage is identified. At or above this voltage, the number of stuck interferometric modulators in the panel reaches or exceeds a first threshold number, for example, 50% of the total number of the interferometric modulators constituting the panel. The embodiments can be used to establish stiction benchmark for panel manufacturing processes, to collect data for generating statistical distribution, etc.
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Citations
32 Claims
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1. A method of testing a panel comprising a plurality of interferometric modulators, the method comprising:
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applying a ramped voltage waveform to the plurality of interferometric modulators of the panel; and in response to applying the ramped voltage, identifying a first voltage of the ramped voltage waveform at which a first threshold number of the plurality of interferometric modulators of the panel enter a stiction state, wherein with respect to an interferometric modulator that enters the stiction state, a first portion of the interferometric modulator adheres to a second portion of the interferometric modulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An apparatus for testing a panel comprising a plurality of interferometric modulators, comprising:
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a voltage source configured to apply a ramped voltage waveform to the plurality of interferometric modulators of the panel; a detector configured to detect whether a number of the plurality of interferometric modulators of the panel are in a. stiction state, wherein with respect to an interferometric modulator that is in the stiction state, a first portion of the interferometric modulator adheres to a second portion of the interferometric modulator; and a processor configured to communicate with the voltage source and the detector and identify a first voltage at which a first threshold number of the plurality of interferometric modulators of the panel enter the stiction state. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An apparatus for testing a panel comprising a plurality of interferometric modulators, comprising:
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means for applying a ramped voltage waveform to the plurality of interferometric modulators of the panel; and means for, in response to applying the ramped voltage, identifying a first voltage at which a first threshold number of the plurality of interferometric modulators of the panel enter a stiction state, wherein with respect to an interferometric modulator that enters the stiction state, a first portion of the interferometric modulator adheres to a second portion of the interferometric modulator. - View Dependent Claims (24, 25)
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26. A non-transitory computer-readable medium having stored thereon instructions, comprising:
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instructions that, when executed by a computer, cause the computer to apply a ramped voltage waveform to a plurality of interferometric modulators of a panel; and instructions that, when executed by the computer, cause the computer to in response to applying the ramped voltage, identify a first voltage at which a first threshold number of the plurality of interferometric modulators of the panel enter a stiction state, wherein with respect to an interferometric modulator that enters the stiction state, a first portion of the interferometric modulator adheres to a second portion of the interferometric modulator. - View Dependent Claims (27, 28, 29, 30, 31, 32)
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Specification