Spatial light modulator with integrated optical compensation structure
First Claim
1. A spatial light modulator comprising:
- a substrate;
a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate;
a first optical compensation structure under the substrate;
a second optical compensation structure between the substrate and the light-modulating elements, at least a portion of the second optical compensation structure, facing the plurality of light-modulating elements, being non-planar; and
a planarization layer between the second optical compensation structure and the plurality of light-modulating elements, the planarization layer contacting the non-planar portion of the second optical compensation structure.
3 Assignments
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Accused Products
Abstract
A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
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Citations
34 Claims
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1. A spatial light modulator comprising:
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a substrate; a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate; a first optical compensation structure under the substrate; a second optical compensation structure between the substrate and the light-modulating elements, at least a portion of the second optical compensation structure, facing the plurality of light-modulating elements, being non-planar; and a planarization layer between the second optical compensation structure and the plurality of light-modulating elements, the planarization layer contacting the non-planar portion of the second optical compensation structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A spatial light modulator comprising:
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a substrate; a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate; a first optical compensation structure under the substrate; a second optical compensation structure having a non-planar portion and arranged between the substrate and the light-modulating elements, wherein the second optical compensation structure comprises one or more of the group consisting of a plurality of scattering elements, a microlens array, a diffuser, and a diffractive optical element; and a planarization layer between the second optical compensation structure and the plurality of light-modulating elements, the planarization layer in contact with the non-planar portion of the second optical compensation structure. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A spatial light modulator comprising:
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a substrate; a plurality of light-modulating elements over the substrate, the light-modulating elements configured to interferometrically modulate light transmitted through the substrate; a first optical compensation structure under the substrate; a second optical compensation structure arranged between the substrate and the light-modulating elements, wherein the first optical compensation structure is configured to achieve a different optical effect than the second optical compensation structure; and a planarization layer between the second optical compensation structure and the plurality of light-modulating elements, the planarization layer in contact with a non-planar portion of the second optical compensation structure. - View Dependent Claims (30, 31, 32, 33, 34)
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Specification