Ultrasonic transducer, method of manufacturing ultrasonic transducer, ultrasonic diagnostic apparatus, and ultrasonic microscope
First Claim
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1. An ultrasonic transducer comprising:
- a transducer cell including;
a first electrode;
a vibration membrane disposed on the first electrode, separated by an air gap portion; and
a second electrode supported by the vibration membrane;
a first conductive layer electrically connected to the first electrode;
a second conductive layer disposed facing the first conductive layer and electrically connected to the second electrode;
an electret for retaining a charge and applying a predetermined potential difference between the first electrode and the second electrode, the electret being disposed in a region between the first conductive layer and the second conductive layer, where the electret do not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves generated by vibration of the vibration membrane.
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Abstract
A ultrasonic transducer of the invention comprises: a transducer cell including a first electrode and a second electrode disposed separated from the first electrode by an air gap portion; and an electret for applying a potential difference between the first electrode and the second electrode. The electret is disposed in a region where at least a part thereof does not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves.
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Citations
15 Claims
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1. An ultrasonic transducer comprising:
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a transducer cell including;
a first electrode;
a vibration membrane disposed on the first electrode, separated by an air gap portion; and
a second electrode supported by the vibration membrane;a first conductive layer electrically connected to the first electrode; a second conductive layer disposed facing the first conductive layer and electrically connected to the second electrode; an electret for retaining a charge and applying a predetermined potential difference between the first electrode and the second electrode, the electret being disposed in a region between the first conductive layer and the second conductive layer, where the electret do not overlap with the transducer cell when viewed from a transmitting direction of ultrasonic waves generated by vibration of the vibration membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification