Method for manufacturing micro movable element

• US 8,202,382 B2
• Filed: 07/27/2009
• Issued: 06/19/2012
• Est. Priority Date: 07/28/2008
• Status: Active Grant

• Current Assignee: DRNC Holdings, Inc. (InterDigital, Inc.)
• Original Assignee: Fujitsu Limited
• Inventors: Kouma, Norinao, Tsuboi, Osamu, Mizuno, Yoshihiro, Soneda, Hiromitsu, Okuda, Hisao, Matsumoto, Tsuyoshi, Sawaki, Ippei
• Primary Examiner(s): Olsen, Allan
• Application Number:
  US12/509,584
• Publication Number:
  US 20100018635A1
• Time in Patent Office: 1,058 Days
• Field of Search: None
• US Class Current: 156/155
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/0154 Torsion bars
• CPC Class Codes: B81C 1/00825 Protect against mechanical threats, e.g. against shocks, or residues B81C1/00261 take precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: H04Q 2213/13003 Constructional details of switching devices

Abstract

A method for manufacturing a micro movable element includes: forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate; bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and patterning the film to form a support structure being bridged between the movable section and the frame.

Claims

1. A method for manufacturing a micro movable element, comprising:

forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate;

bonding a film to a surface of the substrate in during forming the movable section, the frame, and the connecting section;

patterning the film to form a support structure bridging the movable section and the frame;

attaching the substrate to a base after patterning the film;

removing the base after forming the movable section, the frame, and the connecting section; and

removing at least a part of the support structure after removing the base.

2. The method for manufacturing the micro movable element according to claim 1, wherein

the support structure is made of an insulating material.