Substrate transport apparatus

• US 8,267,636 B2
• Filed: 05/08/2008
• Issued: 09/18/2012
• Est. Priority Date: 05/08/2007
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Hofmeister, Christopher, Caveney, Robert T.
• Primary Examiner(s): UNDERWOOD, DONALD W
• Application Number:
  US12/117,355
• Publication Number:
  US 20080298944A1
• Time in Patent Office: 1,594 Days
• Field of Search: 414/744.5, 414/744.3, 901/15, 901/23, 744/900.1, 744/900.3
• US Class Current: 414/744.5
• CPC Class Codes: B25J 11/0095 Manipulators transporting wafers
• CPC Class Codes: B25J 18/00 Arms
• CPC Class Codes: B25J 9/106 with articulated links
• CPC Class Codes: B25J 9/126 Rotary actuators
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer
• CPC Class Codes: Y10S 901/15 Jointed arm
• CPC Class Codes: Y10S 901/21 Flaccid drive element
• CPC Class Codes: Y10S 901/23 Electric motor
• CPC Class Codes: Y10S 901/27 Arm part
• CPC Class Codes: Y10T 74/20305 Robotic arm
• CPC Class Codes: Y10T 74/20317 including electric motor
• CPC Class Codes: Y10T 74/20329 Joint between elements

Abstract

A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

Claims

1. A substrate transport apparatus comprising:

a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm;

a second shaftless rotary motor including a second stator and a second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm; and

a first substrate support being coupled to at least one of the first and second arms;

wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators when the substrate transport apparatus is in a retracted configuration and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

2. The substrate transport apparatus of claim 1, further comprising a housing wherein the first and second stators are linearly distributed substantially about a periphery of the housing.

3. The substrate transport apparatus of claim 2, wherein the first and second stators are integrated into walls of the housing.

4. The substrate transport apparatus of claim 1, where each of the first and second arms comprises:

a first rotatable arm link having a center of rotation and a distal end; and

a second arm link rotatably coupled to the distal end of the first arm link;

wherein, the first arm links of each of the first and second arms comprises a respective one of the first and second rotors and each of the second arm links of the first and second arms is rotatably coupled to the first substrate support.

5. The substrate transport apparatus of claim 1, wherein the first and second rotors are in the form of a ring or disk.

6. The substrate transport apparatus of claim 5, wherein the ring or disk of each of the first and second arms forms a self bearing motor with a respective one of the first and second stators.

7. The substrate transport apparatus of claim 4, wherein the first rotatable arm link of each of the first and second arms comprises a respective one of the first and second rotors in the form of an elongated link member where the distal end is opposite the center of rotation.

8. The substrate transport apparatus of claim 1, further comprising:

a third shaftless rotary motor including a third stator and a third rotor, the third stator being linearly distributed and the third rotor being coupled to a third arm;

a fourth shaftless rotary motor including a fourth stator and a fourth rotor, the fourth stator being linearly distributed and the fourth rotor being coupled to a fourth arm, the fourth arm being connected to the third arm; and

a second substrate support being coupled to at least one of the third and fourth arms;

wherein the third stator and fourth stator are configured so that the third and fourth arms and the second substrate support are inside the stators when the substrate transport apparatus is in the retracted configuration and a motor output at a connection between the third and fourth shaftless rotary motors and a respective one of the third and fourth arms is a resultant force disposed peripheral to the first and second arms.

9. The substrate transport apparatus of claim 8, further comprising a frame wherein the first, second, third and fourth stators are linearly distributed substantially about a periphery of the frame.

10. The substrate transport apparatus of claim 8, where the each of the first, second, third and fourth arms comprises:

a first rotatable arm link having a center of rotation and a distal end; and

a second arm link rotatably coupled to the distal end of the first arm link;

wherein,

the first arm links of each of the first second, third and fourth arms comprises a respective one of the first second, third and fourth rotors,

each of the second arm links of the first and second arms is rotatably coupled to the first substrate support, and

each of the second arm links of the third and fourth arms is rotatably coupled to the second substrate support.

11. The substrate transport apparatus of claim 8, wherein the first second, third and fourth rotors are in the form of a ring or disk.

12. The substrate transport apparatus of claim 11, wherein the ring or disk of each of the first second, third and fourth arms forms a self bearing motor with a respective one of the first second, third and fourth stators.

13. The substrate transport apparatus of claim 8, wherein the first rotatable arm link of each of the first second, third and fourth arms comprises a respective one of the first second, third and fourth rotors in the form of an elongated link member where the distal end is opposite the center of rotation.

14. The substrate transport apparatus of claim 8, wherein the first substrate support and the second substrate support extend and retract in substantially opposite directions.

15. The substrate transport apparatus of claim 8, wherein the first substrate support and the second substrate support extend and retract in substantially the same direction.

16. The substrate transport apparatus of claim 8, where each of the first, second third and fourth arms comprises:

a first rotatable arm link having a center of rotation and a distal end; and

a second arm link rotatably coupled to the distal end of the first arm link;

wherein, the first arm links of each of the first, second, third and fourth arms comprises a respective one of the first, second third and fourth rotors, each of the second arm links of the first and second arms is rotatably coupled to the first substrate support and each of the second arm links of the third and fourth arms is rotatably coupled to the second substrate support.

17. The substrate transport apparatus of claim 1, wherein the first and second stators are configured to vertically move the first and second arms.