Micro-mirror hinge

• US 8,432,597 B2
• Filed: 05/08/2006
• Issued: 04/30/2013
• Est. Priority Date: 05/08/2006
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Knipe, Richard L.
• Primary Examiner(s): Lester, Evelyn A.
• Application Number:
  US11/429,840
• Publication Number:
  US 20070258125A1
• Time in Patent Office: 2,549 Days
• Field of Search: 359/223, 359/224, 359290-292, 359/298, 359/303, 359/315, 359/318, 359/320
• US Class Current: 359/224.2
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

According to one embodiment of the present invention a digital micro-mirror device is taught that includes a pixel occupying an area of the device and a hinge coupled to the pixel and positioned such that at least a portion of the hinge falls outside the area of the pixel.

Claims

1. A micromirror device comprising:

a first, second and third deflectable members occupying respective adjacent areas of the micromirror device;

a deflectable member support proximate the center of the first deflectable member;

first and second torsion hinge supports respectively located beneath the second and third deflectable members and

a torsion hinge spaced apart from and coupled to the first deflectable member by the deflectable member support, the torsion hinge positioned along an axis about which the deflectable member rotates and the torsion hinge being supported by the first and second torsion hinge supports.

2. The device of claim 1 wherein the hinge comprises a material selected from the group consisting of aluminum, titanium, tungsten, aluminum alloys, and combinations thereof.

3. The device of claim 1 wherein the deflectable members are reflective deflectable members;

and

the torsion hinge is operable to twist upon deflection of the deflectable member.

4. The device of claim 3 wherein the first torsion hinge support is located centrally beneath the second deflectable member and the second torsion hinge support is located centrally beneath the third deflectable member.

5. An array of deflectable mirror elements comprising:

a first deflectable mirror element that is adjacent to both a second deflectable mirror element and a third deflectable mirror element; and

wherein the first deflectable mirror element comprises a first hinge;

wherein the first hinge is supported by a first support and a second support, the first support being located beneath the second deflectable mirror element and the second support being located beneath the third deflectable mirror element; and

wherein the first hinge comprises a first mounting, said first mounting being connected to the center of said first deflectable mirror element for deflection of the first deflectable mirror element about an axis established by the first hinge.

6. The array of claim 5 wherein:

the second deflectable mirror element comprises a second hinge, the second hinge being supported by a third support and a fourth support, the third support being located beneath the first deflectable mirror element and the fourth support being located beneath a fourth deflectable mirror element adjacent to the second deflectable mirror element; and

the second hinge comprises a second mounting, said second mounting being connected to the center of said second deflectable mirror element for deflection of the second deflectable mirror element about an axis established by the second hinge.

7. The array of claim 6 wherein:

the third deflectable mirror element comprises a third hinge supported by a fifth support and a sixth support, the fifth support being located beneath the first deflectable mirror element and the sixth support being located beneath a fifth deflectable mirror element adjacent to the third deflectable mirror element; and

the third hinge comprises a third mounting, said third mounting being connected to the center of said third deflectable mirror element for deflection of the third deflectable mirror element about an axis established by the third hinge.

8. A method of reflecting light by:

tilting a plurality of deflectable mirror elements coupled to respective ones of a plurality of hinges, each hinge associate with each deflectable mirror element comprising a torsion portion operable to twist upon deflection of a corresponding one of the deflectable elements, the torsion portion traversing at least respective portions of at least two of the plurality of deflectable mirror elements other than the associated deflectable mirror element, and each hinge being supported by supports located beneath the respective at least two other deflectable mirror elements.

9. The method of claim 8 wherein the supports are connected proximate to the centers of the respective at least two other deflectable mirror elements.

10. The method of claim 8 wherein each hinge of the plurality of hinges comprises a material selected from the group consisting of aluminum, titanium, tungsten, aluminum alloys, and combinations thereof.