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Micro-mirror hinge

  • US 8,432,597 B2
  • Filed: 05/08/2006
  • Issued: 04/30/2013
  • Est. Priority Date: 05/08/2006
  • Status: Active Grant
First Claim
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1. A micromirror device comprising:

  • a first, second and third deflectable members occupying respective adjacent areas of the micromirror device;

    a deflectable member support proximate the center of the first deflectable member;

    first and second torsion hinge supports respectively located beneath the second and third deflectable members anda torsion hinge spaced apart from and coupled to the first deflectable member by the deflectable member support, the torsion hinge positioned along an axis about which the deflectable member rotates and the torsion hinge being supported by the first and second torsion hinge supports.

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