Gate valve and substrate processing apparatus equipped with the same
First Claim
1. A gate valve apparatus comprising:
- a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed, the valve casing being made of a conductive metal;
a closure element that is capable of closing the opening portiona sealing member that is provided in the closure element, and contacts the first valve seat thereby to seal the opening portion when the closure element closes the opening portion; and
a shutoff member that is made of a thin conductive metal plate and attached in the closure element, and contacts the second valve seat thereby to shut off a space between the opening portion and the sealing member and to electrically connect the shutoff member with the valve casing through the second valve seat when the closure element closes the opening portion,wherein the shutoff member is caught between a spacer and a fixing member, the spacer being mounted on the closure element, and the shutoff member is attached to the closure element by a screw passing through the fixing member, the shutoff member and the spacer, andwherein the valve casing, the shutoff member, the fixing member, the spacer and the screw are made of conductive metal, and transfer heat from the valve casing to the closure element when the shutoff member closes the opening portion.
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Accused Products
Abstract
A gate valve apparatus is disclosed. The gate valve apparatus is provided with a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed; and a closure element that includes a sealing member that contacts the first valve seat to seal the opening portion. In addition, the gate valve apparatus is provided with a shutoff member that contacts the second valve seat to thereby be deformed, so that a space between the opening portion and a sealing member is shut off by the shutoff member when the closure element closes the opening portion. The shutoff member is deformed and continues to contact the second valve seat under normal and high temperature environments when the closure element closes the opening portion.
14 Citations
14 Claims
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1. A gate valve apparatus comprising:
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a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed, the valve casing being made of a conductive metal; a closure element that is capable of closing the opening portion a sealing member that is provided in the closure element, and contacts the first valve seat thereby to seal the opening portion when the closure element closes the opening portion; and a shutoff member that is made of a thin conductive metal plate and attached in the closure element, and contacts the second valve seat thereby to shut off a space between the opening portion and the sealing member and to electrically connect the shutoff member with the valve casing through the second valve seat when the closure element closes the opening portion, wherein the shutoff member is caught between a spacer and a fixing member, the spacer being mounted on the closure element, and the shutoff member is attached to the closure element by a screw passing through the fixing member, the shutoff member and the spacer, and wherein the valve casing, the shutoff member, the fixing member, the spacer and the screw are made of conductive metal, and transfer heat from the valve casing to the closure element when the shutoff member closes the opening portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A gate valve apparatus comprising:
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a valve casing that includes a first valve seat and a second valve seat, and in which an opening portion is formed, each of the first valve seat and the second valve seat having a flat surface; a step portion formed at a boundary between the first valve seat and the second valve seat; a closure element that is capable of closing the opening portion; a sealing member that is provided in the closure element, and contacts the first valve seat thereby to seal the opening portion when the closure element closes the opening portion; and a shutoff member that is made of a thin metal plate and attached in the closure element, and contacts the second valve seat thereby to shut off a space between the opening portion and the sealing member when the closure element closes the opening portion, wherein the shutoff member is caught between a spacer and a fixing member, the spacer being mounted on the closure element, and the shutoff member is attached to the closure element by a screw passing through the fixing member, the shutoff member and the spacer, and wherein the valve casing, the shutoff member, the fixing member, the spacer and the screw are made of conductive metal, and transfer heat from the valve casing to the closure element when the shutoff member closes the opening portion. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification