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Bragg mirror and BAW resonator with a high quality factor on the bragg mirror

  • US 8,593,234 B2
  • Filed: 10/01/2010
  • Issued: 11/26/2013
  • Est. Priority Date: 10/01/2009
  • Status: Active Grant
First Claim
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1. A Bragg mirror, comprising:

  • a first conductive layer;

    a first dielectric layer on the first conductive layer;

    a second conductive layer between a substrate and the first conductive layer and electrically connected to the first conductive layer, the second conductive layer having an electric conductivity greater than that of the first conductive layer and an acoustic impedance different from that of the first conductive layer.

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