Inertia force sensor
First Claim
Patent Images
1. An inertial sensor comprising:
- an angular velocity sensing element;
an IC for processing signals supplied from the angular velocity sensing element;
a vibration isolator; and
a package for accommodating the angular velocity sensing element and the IC via the vibration isolator,wherein the vibration isolator includes;
a plate, andan outer frame separately surrounding the plate, where the outer frame is coupled to the plate via a wiring pattern,wherein the plate, the IC, the angular velocity sensing element are stacked in this order.
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Abstract
An inertial sensor includes oscillating-type angular velocity sensing element, IC for processing signals supplied from angular velocity sensing element, capacitor for processing signals, and package for accommodating angular velocity sensing element, IC, capacitor. Element and IC are housed in package via a vibration isolator, which is formed of TAB tape, plate on which IC is placed, where angular velocity sensing element is layered on IC, and outer frame placed outside and separately from plate and yet coupled to plate via wiring pattern.
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Citations
21 Claims
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1. An inertial sensor comprising:
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an angular velocity sensing element; an IC for processing signals supplied from the angular velocity sensing element; a vibration isolator; and a package for accommodating the angular velocity sensing element and the IC via the vibration isolator, wherein the vibration isolator includes; a plate, and an outer frame separately surrounding the plate, where the outer frame is coupled to the plate via a wiring pattern, wherein the plate, the IC, the angular velocity sensing element are stacked in this order. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A sensor comprising:
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an inertial force sensing element; an IC for processing signals supplied from the inertial force sensing element; a member; and a package for accommodating the inertial force sensing element, the member and the IC, wherein the member includes; a plate, and an outer frame separately surrounding the plate, wherein the plate, the IC, the inertial force sensing element are stacked in this order. - View Dependent Claims (18, 19, 20, 21)
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Specification