Method and device for modulating light
First Claim
Patent Images
1. A device, comprising:
- a substrate;
an array of electromechanical devices over the substrate, each of the array of electromechanical devices comprisinga movable first electrode layer,a first insulator, anda second electrode; and
a plurality of transistors over the substrate, each of the plurality of transistors comprisinga gate,a second insulator, andan electrode,each of the plurality of transistors electrically coupled to at least one of the movable first electrode layer and a second electrode of an electromechanical device in the array,wherein, in each of the array of electromechanical devices, a portion of one of the movable first electrode layer, the first insulator, and the second electrode includes a deposited layer of a material, wherein the deposited material comprises a metal; and
wherein, in each of the plurality of transistors, a portion of one of the gate, the second insulator, and the electrode includes the deposited layer of the material.
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Abstract
Improvements in an interferometric modulator that has a cavity defined by two walls.
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Citations
26 Claims
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1. A device, comprising:
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a substrate; an array of electromechanical devices over the substrate, each of the array of electromechanical devices comprising a movable first electrode layer, a first insulator, and a second electrode; and a plurality of transistors over the substrate, each of the plurality of transistors comprising a gate, a second insulator, and an electrode, each of the plurality of transistors electrically coupled to at least one of the movable first electrode layer and a second electrode of an electromechanical device in the array, wherein, in each of the array of electromechanical devices, a portion of one of the movable first electrode layer, the first insulator, and the second electrode includes a deposited layer of a material, wherein the deposited material comprises a metal; and wherein, in each of the plurality of transistors, a portion of one of the gate, the second insulator, and the electrode includes the deposited layer of the material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a drive circuit for an array of electromechanical devices, the method comprising:
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forming an array of electromechanical devices over a substrate, wherein forming each of the array of electromechanical devices includes forming a movable first electrode layer, forming a first insulator, and forming a second electrode, wherein one of forming the movable first electrode layer, forming the first insulator, and forming the second electrode layer includes depositing a material in a layer over a substrate, wherein the deposited material comprises one of molybdenum and tantalum; and forming a plurality of transistors over the substrate, wherein forming each of the plurality of transistors includes forming a gate, forming a second insulator, and forming an electrode, wherein one of forming the gate, forming the second insulator, and forming the electrode includes depositing the material in the layer over the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of manufacturing a drive circuit for an array of electromechanical devices, the method comprising:
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forming an array of electromechanical devices over a substrate, wherein forming each of the array of electromechanical devices includes forming a movable first electrode layer, forming a first insulator, and forming a second electrode, wherein one of forming the movable first electrode layer, forming the first insulator, and forming the second electrode layer includes depositing a material in a layer over a substrate; and forming a plurality of transistors over the substrate, wherein forming each of the plurality of transistors includes forming a gate, forming a second insulator, and forming an electrode, wherein one of forming the gate, forming the second insulator, and forming the electrode includes depositing the material in the layer over the substrate, wherein a portion of the second electrode of the electromechanical devices and a portion of the electrodes of the transistors each comprise a portion of the deposited material. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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Specification