Metrology apparatus
First Claim
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1. A metrology apparatus, comprising:
- a first structure rotatably connected to a second structure by a bearing arrangement, the bearing arrangement including at least a first friction bearing comprising parts in sliding contact during rotation of the first structure relative to the second structure;
at least one magnet that relieves the load on the first friction bearing; and
at least one mechanical stop,wherein the parts of the first friction bearing that are in sliding contact are arranged to disengage when subjected to a mechanical shock, the amount of displacement permitted during such disengagement being limited by the at least one mechanical stop.
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Abstract
Metrology apparatus is described that includes a first structure rotatably connected to a second structure by a bearing arrangement. The bearing arrangement includes at least a first friction bearing including parts in sliding contact during rotation of the first structure relative to the second structure. The apparatus includes at least one magnet that relieves the load on the first friction bearing. Multiple magnets, provided in an attracting or repelling arrangement, may be used. The metrology apparatus may include an articulating probe head for a coordinate positioning apparatus.
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Citations
13 Claims
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1. A metrology apparatus, comprising:
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a first structure rotatably connected to a second structure by a bearing arrangement, the bearing arrangement including at least a first friction bearing comprising parts in sliding contact during rotation of the first structure relative to the second structure; at least one magnet that relieves the load on the first friction bearing; and at least one mechanical stop, wherein the parts of the first friction bearing that are in sliding contact are arranged to disengage when subjected to a mechanical shock, the amount of displacement permitted during such disengagement being limited by the at least one mechanical stop. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A metrology apparatus, comprising:
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a first structure rotatably connected to a second structure by a bearing arrangement, the bearing arrangement including at least a first friction bearing comprising parts in sliding contact during rotation of the first structure relative to the second structure; and at least one mechanical stop, wherein the parts of the first friction bearing that are in sliding contact are arranged to disengage when subjected to a mechanical shock, and wherein the amount of displacement permitted during such disengagement is limited by the at least one mechanical stop.
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Specification