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Metrology apparatus

  • US 9,052,177 B2
  • Filed: 07/20/2011
  • Issued: 06/09/2015
  • Est. Priority Date: 07/21/2010
  • Status: Active Grant
First Claim
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1. A metrology apparatus, comprising:

  • a first structure rotatably connected to a second structure by a bearing arrangement, the bearing arrangement including at least a first friction bearing comprising parts in sliding contact during rotation of the first structure relative to the second structure;

    at least one magnet that relieves the load on the first friction bearing; and

    at least one mechanical stop,wherein the parts of the first friction bearing that are in sliding contact are arranged to disengage when subjected to a mechanical shock, the amount of displacement permitted during such disengagement being limited by the at least one mechanical stop.

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