Micro pick up array mount with integrated displacement sensor
First Claim
Patent Images
1. A micro pick up array mount comprising:
- a pivot platform;
a base laterally around the pivot platform;
a compliant element between the pivot platform and the base, wherein the compliant element is coupled with the pivot platform at an inner pivot and coupled with the base at an outer pivot;
a strain gauge integrated along a length of the compliant element; and
a reference strain gauge integrated along the length of the compliant element.
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Abstract
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.
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Citations
17 Claims
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1. A micro pick up array mount comprising:
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a pivot platform; a base laterally around the pivot platform; a compliant element between the pivot platform and the base, wherein the compliant element is coupled with the pivot platform at an inner pivot and coupled with the base at an outer pivot; a strain gauge integrated along a length of the compliant element; and a reference strain gauge integrated along the length of the compliant element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification