Driving device of display apparatus and method of manufacturing the driving device
First Claim
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1. A driving device of a display apparatus, the driving device comprising:
- an active device formed in a first region of a substrate;
a micro optical switch device formed in a second region of the substrate wherein the active device is not formed; and
a capacitor formed on the substrate between the active device and the micro optical switch device, wherein the active device comprises;
a gate electrode formed in the first region of the substrate;
an insulating layer formed on the gate electrode;
an active region formed on the insulating layer above the gate electrode; and
a source region and a drain region respectively formed at either side of the active region, wherein the micro optical switch device comprises;
a first electrode formed on the insulating layer in the second region of the substrate; and
a second electrode formed above and spaced apart from the first electrode, and wherein a passivation layer is formed on the source region, the drain region, and directly on the first electrode.
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Abstract
A driving device of a display apparatus, and a method of manufacturing the driving device. The driving device may have a specific structure, and be manufactured in such a manner, because a first electrode of a micro optical switch device may be formed simultaneously with the formation of at least a source region and a drain region, or a gate electrode of an active device and a capacitor electrode.
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Citations
14 Claims
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1. A driving device of a display apparatus, the driving device comprising:
- an active device formed in a first region of a substrate;
a micro optical switch device formed in a second region of the substrate wherein the active device is not formed; and
a capacitor formed on the substrate between the active device and the micro optical switch device, wherein the active device comprises;
a gate electrode formed in the first region of the substrate;
an insulating layer formed on the gate electrode;
an active region formed on the insulating layer above the gate electrode; and
a source region and a drain region respectively formed at either side of the active region, wherein the micro optical switch device comprises;
a first electrode formed on the insulating layer in the second region of the substrate; and
a second electrode formed above and spaced apart from the first electrode, and wherein a passivation layer is formed on the source region, the drain region, and directly on the first electrode. - View Dependent Claims (2, 3)
- an active device formed in a first region of a substrate;
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4. A driving device of a display apparatus, the driving device comprising:
- an active device formed in a first region of a substrate;
a micro optical switch device formed in a second region of the substrate wherein the active device is not formed; and
a capacitor formed on the substrate between the active device and the micro optical switch device, wherein the active device comprises;
a gate electrode formed in the first region of the substrate;
an insulating layer formed on the gate electrode;
an active region formed on the insulating layer above the gate electrode; and
a source region and a drain region respectively formed at either side of the active region, wherein the micro optical switch device comprises;
a first electrode formed in the second region on the substrate; and
a second electrode formed above and spaced apart from the first electrode, and wherein a passivation layer is formed on the source region, the drain region, and directly on the first electrode. - View Dependent Claims (5, 6)
- an active device formed in a first region of a substrate;
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7. A method of manufacturing a driving device of a display apparatus, the method comprising:
- forming a gate electrode of an active device and a capacitor electrode on a substrate;
forming an active region on an insulating layer above the gate electrode;
forming a source region and a drain region of the active device, and a first electrode of a micro optical switch device, by forming a conductive material layer on the insulating layer and the active region, and patterning the conductive material layer; and
forming a passivation layer on the source region, the drain region, and directly on the first electrode using an insulating material, wherein the micro optical switch device is formed in a region of the substrate wherein the active device is not formed. - View Dependent Claims (8)
- forming a gate electrode of an active device and a capacitor electrode on a substrate;
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9. A method of manufacturing a driving device of a display apparatus, the method comprising:
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forming a gate electrode of an active device, a capacitor electrode, and a first electrode of a micro optical switch device by forming a conductive material layer on a substrate and patterning the conductive material layer, and forming an insulating layer; forming an active region on the insulating layer above the gate electrode; and forming a source region and a drain region of the active device. - View Dependent Claims (10, 11)
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12. A method of manufacturing a driving device, the method comprising:
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disposing a first electrode on a substrate at the same time as at least one of a gate electrode and a capacitor electrode, and a source region and a drain region, disposing an insulating layer, an active region, a passivation layer, and a second electrode on the substrate.
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13. A driving device comprising:
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a first electrode disposed on a substrate at a same time and layer depth as at least one of a gate electrode and a capacitor electrode, and a source region and a drain region; and an insulating layer, an active region, a passivation layer, and a second electrode disposed on the substrate. - View Dependent Claims (14)
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Specification