Liquid dispensing systems encompassing gas removal

• US 9,120,616 B2
• Filed: 12/13/2012
• Issued: 09/01/2015
• Est. Priority Date: 06/13/2006
• Status: Active Grant

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Ware, Donald D., Tom, Glenn M., Dathe, Paul, Koland, Amy, Gerold, Jason, Mikkelsen, Kirk, O'Dougherty, Kevin T., Cisewski, Michael A.
• Primary Examiner(s): JACYNA, J CASIMER
• Application Number:
  US13/713,078
• Publication Number:
  US 20130168410A1
• Time in Patent Office: 992 Days
• Field of Search: 222/1, 222/61, 222/95, 222/105
• US Class Current: 1/1
• CPC Class Codes: B65D 83/62 by membrane, bag, or the like containers in which the content is delivered by the contracting forces inherent in the bag B65D83/0061
• CPC Class Codes: B67D 7/0261 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/763 of air separators
• CPC Class Codes: Y10T 137/313 Gas carried by or evolved from liquid

Abstract

Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.

Claims

1. A fluid dispensing system arranged to supply liquid media to a point of use, the fluid dispensing system comprising:

a first pressure dispense package including a first vessel that defines a first dispensing port and that contains a collapsible first liner arranged to hold liquid media susceptible to presence of headspace gas within the first liner, wherein the first dispensing port is in fluid communication with an interior of the first liner;

a first gas removal apparatus configured to remove headspace gas from the first liner while liquid media is being dispensed from the first liner;

a second pressure dispense package including a second vessel that defines a second dispensing port and that contains a collapsible second liner arranged to hold liquid media susceptible to presence of headspace gas within the second liner, wherein the second dispensing port is in fluid communication with an interior of the second liner;

a second gas removal apparatus configured to remove headspace gas from the second liner while liquid media is being dispensed from the second liner; and

at least one sensor arranged to detect a condition indicative of exhaustion or approach to exhaustion of liquid media dispensed from at least one of the first pressure dispense package and the second pressure dispense package;

wherein the second gas removal apparatus is arranged to remove headspace gas from the second pressure dispense package while the first pressure dispense package is dispensing liquid media; and

wherein the fluid dispensing system is arranged to automatically initiate dispensing of liquid media from the second pressure dispense package following detection by the at least one sensor of a condition indicative of exhaustion or approach to exhaustion of liquid media dispensed from the first pressure dispense package.

2. The fluid dispensing system of claim 1, wherein the first gas removal apparatus comprises a first ventable reservoir arranged to receive liquid media from the first pressure dispense package, and the second gas removal apparatus comprises a second ventable reservoir arranged to receive liquid media from the second pressure dispense package.

3. The fluid dispensing system of claim 2, further comprising at least one filter arranged for any of (1) preventing passage of particles through a flow regulation device associated with at least of the first pressure dispense package and the second pressure dispense package, and ((2) restricting the passage of bubbles into at least one of the first ventable reservoir and the second ventable reservoir.

4. The fluid dispensing system of claim 2, wherein each of the first ventable reservoir and the second ventable reservoir respectively comprises (i) a reservoir sensor arranged to sense accumulation of gas within the respective reservoir, and to responsively generate an output signal indicative of such condition, and (ii) at least one control element adapted to effect removal of gas from the respective reservoir responsive to the output signal.

5. The fluid dispensing system of claim 4, wherein the output signal is indicative of any of:

presence of a gas, absence of a gas, presence of a liquid, absence of a liquid, presence of a bubble, and presence of a liquid-gas interface.

6. The fluid dispensing system of claim 4, wherein the sensor comprises at least one of:

a capacitive sensor, a photosensor, and optical sensor, and a teachable sensor.

7. The fluid dispensing system of claim 2, wherein each of the first ventable reservoir and the second ventable reservoir separately includes a liquid media inlet, a liquid media outlet, and a gas outlet that is located higher than the liquid media outlet.

8. The fluid dispensing system of claim 2, further comprising a first dispense connector arranged to physically couple with the first vessel and receive liquid media from the first liner, and a second dispense connector arranged to physically couple with the second vessel and receive liquid media from the second liner.

9. The fluid dispensing system of claim 8, wherein the first dispense connector comprises a first dip tube or probe insertable into the first liner, and the second dispense connector comprises a second dip tube or probe insertable into the second liner.

10. The fluid dispensing system of claim 8, wherein the first dispense connector comprises a first ventable reservoir arranged to receive liquid media from the first liner, and the second dispensing connector comprises a second ventable reservoir arranged to receive liquid media from the second liner.

11. The fluid dispensing system of claim 8, wherein the at least one sensor comprises a first sensor associated with the first dispense connector, and a second sensor associated with the second dispense connector.

12. The fluid dispensing system of claim 1, wherein the at least one sensor comprises a pressure sensor arranged to sense pressure of liquid media dispensed from at least one of the first pressure dispense package and the second pressure dispense package to the point of use.

13. The fluid dispensing system of claim 1, wherein the at least one sensor comprises at least one pressure sensor arranged to compare the following items (i) and (ii):

(i) pressure of liquid media dispensed from at least one of the first pressure dispense package and the second pressure dispense package to the point of use, and (ii) pressure of gas supplied to at least one of the first pressure dispense package and the second pressure dispense package.

14. The fluid dispensing system of claim 1, wherein the first pressure dispense package and the second pressure dispense package are arranged to receive pressurized gas from at least one a pressurized gas source to promote pressure dispensing of liquid media.

15. The fluid dispensing system of claim 1, wherein the liquid media comprises a chemical reagent and the point of use comprises a liquid media-utilizing process tool.

16. A microelectronic product manufacturing facility comprising the fluid dispensing system of claim 15 arranged to supply a chemical reagent to a microelectronic device process tool or semiconductor process tool.

21. The fluid dispensing system of claim 1, wherein:

the first gas removal apparatus removes headspace gas from the first liner upon external imposition of gas pressure on the exterior surface of the first liner while liquid media is present in the first liner; and

the second gas removal apparatus removes headspace gas from the second liner upon external imposition of gas pressure on the exterior surface of the second liner while liquid media is present in the second liner.

17. A method for dispensing liquid media to a point of use, the method comprising:

removing headspace gas from a liquid media-containing collapsible first liner arranged within a first vessel of a first pressure dispense package prior to and during the dispensing of the liquid media from the first liner using a first gas removal apparatus;

applying pressure to the first liner to dispense liquid media from the first pressure dispense package; and

removing headspace gas from a liquid media-containing collapsible second liner arranged within a second vessel of a second pressure dispense package prior to and during the dispensing of the liquid media from the second liner and while the first pressure dispense package is dispensing liquid media using a second gas removal apparatus to ready the second pressure dispense package for dispensation of liquid media from the second pressure dispense package.

18. The method of claim 17, further comprising detecting a condition indicative of exhaustion or approach to exhaustion of liquid media dispensed from the first pressure dispense package, and responsive to said detection, initiating pressure dispensing of liquid media from the second pressure dispense package to the point of use.

19. The method of claim 18, wherein said detecting of a condition indicative of exhaustion or approach to exhaustion of liquid media dispensed from the first pressure dispense package comprises monitoring pressure of liquid media dispensed from the first pressure dispense package and detecting a pressure droop condition.

20. The method of claim 17, wherein removing headspace gas from the first pressure dispense package comprises flowing headspace gas into a first ventable reservoir associated with the first pressure dispense package and venting gas from the first ventable reservoir, and wherein removing gas from the second pressure dispense package comprises flowing headspace gas into a second ventable reservoir associated with the second pressure dispense package and venting gas from the second ventable reservoir.

22. The method of claim 17, wherein the step of applying pressure causes the step of removing headspace gas.