Opto-electronic micro-module and method for forming the same
First Claim
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1. An opto-electronic micro-module comprising:
- a planar substrate having a first surface and a second surface parallel to said first surface, wherein a through hole passes from said first surface through said planar substrate to said second surface; and
an optical substrate having a first portion in said through hole and a second portion protruding from said through hole, wherein said optical substrate has a first surface facing and contacting a first sidewall of said through hole, wherein said second portion has a corner between said first surface of said optical substrate and a second surface of said optical substrate and outside said through hole, wherein said second surface faces a second sidewall of said through hole.
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Abstract
An opto-electronic micro-module includes a monocrystalline substrate having a first surface and a second surface parallel to said first surface, wherein a through hole passes from said first surface through said monocrystalline substrate to said second surface; and an optical substrate having a first portion in said through hole and a second portion protruding from said through hole.
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Citations
20 Claims
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1. An opto-electronic micro-module comprising:
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a planar substrate having a first surface and a second surface parallel to said first surface, wherein a through hole passes from said first surface through said planar substrate to said second surface; and an optical substrate having a first portion in said through hole and a second portion protruding from said through hole, wherein said optical substrate has a first surface facing and contacting a first sidewall of said through hole, wherein said second portion has a corner between said first surface of said optical substrate and a second surface of said optical substrate and outside said through hole, wherein said second surface faces a second sidewall of said through hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification