Method and apparatus for imaging three-dimensional structure
DCFirst Claim
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1. An apparatus for determining surface topology of a portion of a three-dimensional structure, the apparatus comprising:
- a probing member;
an illumination unit configured to generate a plurality of incident light beams;
an optical system configured to focus the plurality of incident light beams to a focal plane external to the probing member so as to illuminate the portion of the three-dimensional structure;
a detector unit configured to measure a characteristic of a plurality of returned light beams generated from illuminating the portion of the three-dimensional structure with the plurality of incident light beams; and
a processor coupled to the detector unit and configured to determine a surface topology of the portion of the three-dimensional structure based at least in part on the measured characteristic of the plurality of returned light beams.
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Abstract
An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.
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Citations
20 Claims
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1. An apparatus for determining surface topology of a portion of a three-dimensional structure, the apparatus comprising:
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a probing member; an illumination unit configured to generate a plurality of incident light beams; an optical system configured to focus the plurality of incident light beams to a focal plane external to the probing member so as to illuminate the portion of the three-dimensional structure; a detector unit configured to measure a characteristic of a plurality of returned light beams generated from illuminating the portion of the three-dimensional structure with the plurality of incident light beams; and a processor coupled to the detector unit and configured to determine a surface topology of the portion of the three-dimensional structure based at least in part on the measured characteristic of the plurality of returned light beams. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for imaging a portion of a three-dimensional structure, the method comprising:
providing an apparatus comprising; a probing member; an illumination unit configured to generate a plurality of incident light beams; an optical system configured to focus the plurality of incident light beams to a focal plane external to the probing member so as to illuminate the portion of the three-dimensional structure; a detector unit configured to measure a characteristic of a plurality of returned light beams that are generated from illuminating the portion of the three-dimensional structure with the plurality of incident light beams; and a processor coupled to the detector unit and configured to determine a surface topology of the portion of the three-dimensional structure based at least in part on the measured characteristic of the plurality of returned light beams. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method for imaging a portion of a three-dimensional structure, the method comprising:
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providing a probing member; generating a plurality of incident light beams; focusing the plurality of incident light beams to a focal plane external to the probing member so as to illuminate the portion of the three-dimensional structure; measuring a characteristic of a plurality of returned light beams generated from illuminating the portion of the three-dimensional structure with the plurality of incident light beams; and determining a surface topology of the portion of three-dimensional structure based at least in part on the measured characteristic of the plurality of returned light beams. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification