Electromagnetic resonator pressure sensor

• US 9,677,962 B2
• Filed: 11/06/2014
• Issued: 06/13/2017
• Est. Priority Date: 11/06/2013
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Original Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Inventors: Mercier, Denis
• Primary Examiner(s): HA, NGUYEN Q
• Application Number:
  US14/534,612
• Publication Number:
  US 20150128712A1
• Time in Patent Office: 950 Days
• CPC Class Codes: G01L 21/10 by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
• CPC Class Codes: G01L 9/0008 using vibrations

Abstract

The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator.

Claims

1. A pressure sensor, said pressure sensor comprising:

an electromagnetic resonator with a waveguide comprising a dielectric material having a dielectric permittivity that varies with temperature;

an excitation circuit configured to propagate an electromagnetic field through said waveguide;

a device for heating said resonator;

a device for detecting an electromagnetic resonant frequency of the resonator; and

a device for determining a pressure of a gas surrounding the sensor as a function of the detected electromagnetic resonant frequency.

2. The pressure sensor according to claim 1, in which said dielectric material has a temperature coefficient of permittivity at least equal to 80 ppm/°

C.

3. The pressure sensor according to claim 1, in which said dielectric material has a crystalline structure of the perovskite type.

4. The pressure sensor according to claim 1, in which said dielectric material comprises a superposition of several layers of materials of which at least one has a dielectric permittivity that varies with temperature.

5. The pressure sensor according to claim 1, further comprising a cavity created to receive a gas, the pressure of which is to be measured, said electromagnetic resonator being at least partially housed in this cavity.

6. The pressure sensor according to claim 5, in which the resonator comprises a front face and a rear face, said front face being positioned in said cavity in direct contact with the gas, the pressure of which is to be measured, and wherein said rear face is arranged outside the cavity.

7. The pressure sensor according to claim 1, in which the device for heating said resonator is configured to heat said dielectric material to a temperature of between 80 and 200°

C.

8. The pressure sensor according to claim 1, in which the heating device comprises a beating resistance in contact with said dielectric material.

9. The pressure sensor according to claim 1, in which said device for detecting the electromagnetic resonant frequency of the resonator measures the frequency of electrical resonance of an oscillating circuit including said resonator and said excitation circuit.

10. The pressure sensor according to claim 1, wherein said resonator comprises a dielectric waveguide that comprises a block of dielectric material;

and two conducting electrodes electromagnetically coupled to the block, said excitation circuit being connected to said electrodes.

11. The pressure sensor according to claim 1, wherein said resonator comprises a coplanar waveguide, wherein said coplanar waveguide comprises a conducting micro strip;

two ground traces on the same plane as the conducting micro strip; and

a dielectric on which the two ground traces and the conducting micro strip are arranged;

wherein the detection device and the excitation circuit comprise at least one conducting electrode electromagnetically coupled to the micro strip and to the two ground traces.

12. The pressure sensor according to claim 1, wherein said excitation circuit is configured to propagate an electromagnetic field having a frequency at least equal to 100 MHz through said resonator.

13. The pressure sensor according to claim 1, wherein said resonator comprises a micro-strip waveguide, wherein, said micro-strip waveguide comprises a conducting micro strip and a ground plane made of conducting material, wherein the dielectric material that has a dielectric permittivity that varies with temperature is arranged between the ground plane the conducting micro strip;

and wherein the detection device and the excitation circuit comprise at least one conducting electrode electromagnetically coupled to the micro strip via said dielectric material.

14. The pressure sensor according to claim 13, further comprising two conducting electrodes, the detection device and the excitation circuit respectively comprising one of said electrodes.

15. A method for measuring a pressure of a gas, said method comprising:

placing an electromagnetic resonator in thermal contact with the gas, the electromagnetic resonator including a waveguide comprising a dielectric material that has a dielectric permittivity that varies with temperature;

heating said resonator;

electromagnetically exciting an electromagnetic wave that propagate through said waveguide;

detecting an electromagnetic resonant frequency of the resonator that has propagated through said waveguide; and

determining the pressure of the gas as a function of the detected electromagnetic resonant frequency.