Method for producing aligned carbon nanotube assembly
First Claim
1. A method for producing aligned carbon nanotube aggregates on a substrate supporting a catalyst on a surface of the substrate,the method comprising the following steps carried out by use of a production apparatus including:
- a growth unit including a growth furnace, anda first seal, the first seal including at least one seal gas ejection section and at least one exhaust section, the method comprising;
growing in the growth furnace of the growth unit the aligned carbon nanotube aggregates;
ejecting a seal gas from the at least one seal gas ejection section along an opening plane of at least one of(i) an inlet or an outlet of the growth furnace, and(ii) both the inlet and the outlet of the growth furnace, andexhausting, via the at least one exhaust section, the seal gas thus ejected so that the seal gas does not flow into the growth furnace.
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Abstract
Provided is a production apparatus (100) for continuously producing aligned carbon nanotube aggregates on a substrate supporting a catalyst while continuously transferring the substrate. The production apparatus (100) includes gas mixing prevention means (12, 13) for preventing gas present outside a growth furnace (3a) from flowing into the growth furnace (3a). The gas mixing prevention means (12, 13) includes a seal gas ejection section (12b, 13b) so that the seal gas does not flow into the growth furnace through the openings of the growth furnace. The production apparatus prevents the outside air from flowing into the production apparatus, uniformly controls, within a range suitable to production of CNTs, a concentration distribution(s) and a flow rate distribution(s) of a raw material gas and/or a catalyst activation material on the substrate, and does not disturb gas flow as much as possible in the growth furnace.
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Citations
8 Claims
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1. A method for producing aligned carbon nanotube aggregates on a substrate supporting a catalyst on a surface of the substrate,
the method comprising the following steps carried out by use of a production apparatus including: -
a growth unit including a growth furnace, and a first seal, the first seal including at least one seal gas ejection section and at least one exhaust section, the method comprising; growing in the growth furnace of the growth unit the aligned carbon nanotube aggregates; ejecting a seal gas from the at least one seal gas ejection section along an opening plane of at least one of (i) an inlet or an outlet of the growth furnace, and (ii) both the inlet and the outlet of the growth furnace, and exhausting, via the at least one exhaust section, the seal gas thus ejected so that the seal gas does not flow into the growth furnace. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification