Method for producing aligned carbon nanotube assembly

• US 9,682,863 B2
• Filed: 11/23/2015
• Issued: 06/20/2017
• Est. Priority Date: 07/01/2009
• Status: Active Grant

• Current Assignee: National Institute of Advanced Industrial Science and Technology (Government of Japan), ZEON Corporation
• Original Assignee: National Institute of Advanced Industrial Science and Technology (Government of Japan), ZEON Corporation
• Inventors: Shibuya, Akiyoshi, Hata, Kenji, Yumura, Motoo
• Primary Examiner(s): MCCRACKEN, DANIEL
• Application Number:
  US14/949,697
• Publication Number:
  US 20160075558A1
• Time in Patent Office: 575 Days
• Field of Search: 4234471-4473, 423445 B, 977742-754, 977842-848
• CPC Class Codes: B01J 15/005 in the presence of catalytically active bodies, e.g. porous plates
• CPC Class Codes: B01J 19/0006 Controlling or regulating processes controlling or regulating in general G05
• CPC Class Codes: B01J 19/0073 Sealings sealings for pressure vessels per se F16J15/00
• CPC Class Codes: B01J 19/22 in the form of endless belts
• CPC Class Codes: B01J 2219/00159 controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/08 Aligned nanotubes
• CPC Class Codes: C01B 32/164 involving continuous processes
• CPC Class Codes: C23C 16/0218 in a reactive atmosphere C23C16/0227 takes precedence
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: C23C 16/4408 by purging residual gases from the reaction chamber or gas lines
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C23C 16/45502 Flow conditions in reaction chamber
• CPC Class Codes: Y02P 20/141 Feedstock

Abstract

Provided is a production apparatus (100) for continuously producing aligned carbon nanotube aggregates on a substrate supporting a catalyst while continuously transferring the substrate. The production apparatus (100) includes gas mixing prevention means (12, 13) for preventing gas present outside a growth furnace (3a) from flowing into the growth furnace (3a). The gas mixing prevention means (12, 13) includes a seal gas ejection section (12b, 13b) so that the seal gas does not flow into the growth furnace through the openings of the growth furnace. The production apparatus prevents the outside air from flowing into the production apparatus, uniformly controls, within a range suitable to production of CNTs, a concentration distribution(s) and a flow rate distribution(s) of a raw material gas and/or a catalyst activation material on the substrate, and does not disturb gas flow as much as possible in the growth furnace.

Claims

1. A method for producing aligned carbon nanotube aggregates on a substrate supporting a catalyst on a surface of the substrate,

the method comprising the following steps carried out by use of a production apparatus including:

a growth unit including a growth furnace, and

a first seal, the first seal including at least one seal gas ejection section and at least one exhaust section, the method comprising;

growing in the growth furnace of the growth unit the aligned carbon nanotube aggregates;

ejecting a seal gas from the at least one seal gas ejection section along an opening plane of at least one of

(i) an inlet or an outlet of the growth furnace, and

(ii) both the inlet and the outlet of the growth furnace, and

exhausting, via the at least one exhaust section, the seal gas thus ejected so that the seal gas does not flow into the growth furnace.

2. The method as set forth in claim 1 for producing the aligned carbon nanotube aggregates, further comprising the following step carried out by use of a formation unit including a formation furnace in which the catalyst supported by the substrate is caused to be surrounded by a reducing gas environment constituted by a reducing gas, and at least either the catalyst or the reducing gas is heated:

a formation step for causing the catalyst supported by the substrate to be surrounded by the reducing gas environment constituted by the reducing gas, and heating at least either the catalyst or the reducing gas, the formation step being carried out before the growing step.

3. The method as set forth in claim 1 for producing the aligned carbon nanotube aggregates, wherein:

the growing step includes adding a catalyst activation material into the growth furnace.

4. The method as set forth in claim 3 for producing the aligned carbon nanotube aggregates, wherein:

the seal gas is ejected from the at least one seal gas ejection section along the opening plane of the inlet of the growth furnace, and

the seal gas is exhausted out of the production apparatus, so that the seal gas does not flow into the growth furnace through the inlet of the growth furnace.

5. The method as set forth in claim 4 for producing the aligned carbon nanotube aggregates, wherein:

the at least one seal gas ejection section performs not only the ejecting of the seal gas but also the adding of the catalyst activation material.

6. The method as set forth in claim 1 for producing the aligned carbon nanotube aggregates, the method further comprising:

moving, via a transfer unit, the substrate supporting a catalyst through the production apparatus, the transfer unit extending through openings in opposite sides of the production apparatus.

7. The method as set forth in claim 1 for producing the aligned carbon nanotube aggregates, the method further comprising:

ejecting a raw material gas via a raw material gas ejection section included in the growth unit, and

exhausting gas present in the growth furnace via an exhaust hood.

8. The method as set forth in claim 2 for producing the aligned carbon nanotube aggregates, the method further comprising:

ejecting, via at least one seal gas ejection section included in a second seal, seal gas along an opening plane of;

(i) an inlet or an outlet of the formation furnace or

(ii) both the inlet and the outlet of the formation furnace; and

exhausting, via at least one exhaust section included in the second seal, the seal gas thus ejected so that the seal gas does not flow into the formation furnace.