Method of manufacturing pressure sensor, deposition system, and annealing system
First Claim
1. A deposition system comprising:
- a substrate holder holding a substrate; and
a deposition portion performing deposition on the substrate held by the substrate holder,the substrate holder comprising a support mechanism and a holding mechanism, the substrate holder holding the substrate between the support mechanism and the holding mechanism,the support mechanism comprising a first movable support member and a second movable support member which are arranged in a first direction, the first movable support member and the second movable support member extending in a second direction crossing the first direction,the holding mechanism comprising a first movable holding member and a second movable holding member arranged in the first direction, andthe first movable support member, the second movable support member, the first movable holding member and the second movable holding member being movable in a third direction crossing the first and the second directions.
1 Assignment
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Accused Products
Abstract
A method of manufacturing a pressure sensor comprises: above a film portion formed on one surface of a substrate, depositing a first magnetic layer, a second magnetic layer and an intermediate layer between the first and second magnetic layers on one surface of a substrate; removing the deposited layers leaving a part thereof; and removing a part of the substrate from another surface of the substrate. By removing the deposited layers leaving a part thereof, a strain detecting element is formed in a part of a first region, the strain detecting element comprising the first magnetic layer, the second magnetic layer and the intermediate layer. By removing a part of the substrate, a part of the first region of the substrate is removed. In addition, the deposition of the first magnetic layer is performed with the substrate being bended.
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Citations
14 Claims
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1. A deposition system comprising:
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a substrate holder holding a substrate; and a deposition portion performing deposition on the substrate held by the substrate holder, the substrate holder comprising a support mechanism and a holding mechanism, the substrate holder holding the substrate between the support mechanism and the holding mechanism, the support mechanism comprising a first movable support member and a second movable support member which are arranged in a first direction, the first movable support member and the second movable support member extending in a second direction crossing the first direction, the holding mechanism comprising a first movable holding member and a second movable holding member arranged in the first direction, and the first movable support member, the second movable support member, the first movable holding member and the second movable holding member being movable in a third direction crossing the first and the second directions. - View Dependent Claims (2)
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3. A deposition system comprising:
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a substrate holder holding a substrate; and a deposition portion performing deposition on the substrate held by the substrate holder, the substrate holder comprising, a support mechanism supporting the substrate, and a holding mechanism holding the substrate, the support mechanism comprising a first movable support member and a second movable support member which are arranged in a first direction, the first movable support member and the second movable support member extending in a second direction crossing the first direction, the first movable support member and the second movable support member being movable in a third direction crossing the first and the second directions, the first movable support member and the second movable support member having first surfaces facing the substrate, and the first surface having a curved surface or a knife edge structure formed in an angular shape. - View Dependent Claims (4, 5, 6, 7)
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8. A deposition system comprising:
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a substrate holder holding a substrate; and a deposition portion performing deposition on the substrate held by the substrate holder, the substrate holder comprising, a support mechanism supporting the substrate, and a holding mechanism holding the substrate, the support mechanism comprising a first movable support member and a second movable support member which are arranged in a first direction, widths of the first movable support member and the second movable support member in a second direction crossing the first direction being larger than widths of the first movable support member and the second movable support member in the first direction, and the first movable support member and the second movable support member being movable in a third direction crossing the first and the second directions. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification