Thickness determination and layer characterization using terahertz scanning reflectometry
First Claim
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1. A terahertz scanning reflectometer for layer thickness determination, comprising:
- a continuous wave terahertz source configured to generate terahertz radiation toward a reference layer and a target layer, wherein the reference layer and the target layer have a related base structure;
a first detector configured to detect a reference layer reflected beam from the reference layer responsive to the terahertz radiation;
a second detector configured to detect a target layer reflected beam from the target layer responsive to the terahertz radiation; and
a processor configured to determine a difference between the reference layer reflected beam and target layer reflected beam,wherein the continuous wave terahertz source includes a pump laser in line with a neutral density filter, a mirror, an emitter and aperture and an IR filter, the continuous wave terahertz source feeds parabolic mirrors and beamsplitters to forward the terahertz radiation which includes a terahertz beam directed to the reference layer and another terahertz beam directed to the target layer.
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Abstract
A terahertz scanning reflectometer system is described herein for in-situ measurement of polymer coating thickness, semiconductor wafer'"'"'s surface sub-surface inspection in a non-destructive and non-invasive fashion with very high resolution (e.g., 25 nm or lower) and spectral profiling and imaging of surface and sub-surface of biological tissues (e.g., skin) in a non-invasive fashion.
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Citations
8 Claims
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1. A terahertz scanning reflectometer for layer thickness determination, comprising:
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a continuous wave terahertz source configured to generate terahertz radiation toward a reference layer and a target layer, wherein the reference layer and the target layer have a related base structure; a first detector configured to detect a reference layer reflected beam from the reference layer responsive to the terahertz radiation; a second detector configured to detect a target layer reflected beam from the target layer responsive to the terahertz radiation; and a processor configured to determine a difference between the reference layer reflected beam and target layer reflected beam, wherein the continuous wave terahertz source includes a pump laser in line with a neutral density filter, a mirror, an emitter and aperture and an IR filter, the continuous wave terahertz source feeds parabolic mirrors and beamsplitters to forward the terahertz radiation which includes a terahertz beam directed to the reference layer and another terahertz beam directed to the target layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification