Embedded transmissive diffractive optical elements
First Claim
1. A lens, comprising:
- a substrate;
a first immersion material layer on the substrate; and
a plurality of anti-reflective phase shift layers on the first immersion material layer, the phase shift layers defining;
a first anti-reflective phase shift region configured to transmit received light without a phase shift;
a second anti-reflective phase shift region configured to transmit the received light with a first phase shift;
a third anti-reflective phase shift region configured to transmit the received light with a second phase shift; and
a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift, the first, second, and third phase shifts being different from one another.
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Accused Products
Abstract
Various embodiments provide optical lenses that include phase shift layers that transmit incident light with four or more distinct phase quantizations. In one embodiment, a lens includes a substrate, a first immersion material layer on the substrate, and a plurality of anti-reflective phase shift layers on the first immersion material layer. The phase shift layers define a first anti-reflective phase shift region that transmits received light without a phase shift, a second anti-reflective phase shift region configured to transmit the received light with a first phase shift, a third anti-reflective phase shift region configured to transmit the received light with a second phase shift, and a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift. The first, second, and third phase shifts are different from one another.
29 Citations
18 Claims
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1. A lens, comprising:
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a substrate; a first immersion material layer on the substrate; and a plurality of anti-reflective phase shift layers on the first immersion material layer, the phase shift layers defining; a first anti-reflective phase shift region configured to transmit received light without a phase shift; a second anti-reflective phase shift region configured to transmit the received light with a first phase shift; a third anti-reflective phase shift region configured to transmit the received light with a second phase shift; and a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift, the first, second, and third phase shifts being different from one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A lens, comprising:
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an immersion material layer having opposite first and second surfaces; and a plurality of separate anti-reflective phase shift layers embedded in the immersion material layer between the first and second surfaces, the anti-reflective phase shift layers being spaced apart from one another by portions of the immersion material layer extending between adjacent ones of the plurality of anti-reflective phase shift layers, the lens including; a first anti-reflective phase shift region configured to transmit received light without a phase shift; a second anti-reflective phase shift region configured to transmit the received light with a first phase shift; a third anti-reflective phase shift region configured to transmit the received light with a second phase shift; and a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift, the first, second, third, and fourth phase shifts being different from one another. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification