Contact structure
First Claim
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1. An active matrix display device comprising:
- a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having at least two openings;
a second conductive film provide on said second interlayer insulating film and in said openings;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between said first substrate and said second substrate;
wherein said first conductive film is connected with said second conductive film ins aid openings;
wherein at least one of said conductive spacers is held over said second interlayer insulating film and in contact with both said second conductive film and said third conductive film.
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Abstract
There is disclosed a contact structure for electrically connecting conducting lines formed on a first substrate of an electrooptical device such as a liquid crystal display with conducting lines formed on a second substrate via conducting spacers while assuring a uniform cell gap among different cells if the interlayer dielectric film thickness is nonuniform across the cell or among different cells. A first conducting film and a dielectric film are deposited on the first substrate. Openings are formed in the dielectric film. A second conducting film covers the dielectric film left and the openings. The conducting spacers electrically connect the second conducting film over the first substrate with a third conducting film on the second substrate. The cell gap depends only on the size of the spacers, which maintain the cell gap.
10 Citations
30 Claims
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1. An active matrix display device comprising:
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a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having at least two openings;
a second conductive film provide on said second interlayer insulating film and in said openings;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between said first substrate and said second substrate;
wherein said first conductive film is connected with said second conductive film ins aid openings;
wherein at least one of said conductive spacers is held over said second interlayer insulating film and in contact with both said second conductive film and said third conductive film. - View Dependent Claims (2, 3, 4, 5)
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6. An active matrix display device comprising:
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a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having at least two openings;
a second conductive film provided on said second interlayer insulating film and in said openings;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between said first substrate and said second substrate;
wherein said first conductive film is connected with said second conductive film in said openings, wherein said conductive spacers are dispersed into a sealing material, wherein at least one of said conductive spacers is held over said second interlayer insulating film and in contact with both said second conductive film and said third conductive film. - View Dependent Claims (7, 8, 9, 10)
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11. An active matrix display device comrpising:
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a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having at least two openings;
a second conductive film provided on said second interlayer insulating film and in said openings;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between said first substrate and said second substrate;
wherein said first conductive film is connected with said second conductive film in said openings;
wherein at least one of said conductive spacers is held over said second interlayer insulating film and in contact with both said second conductive film and said third conductive film, wherein each of said openings occupies an area larger than an area occupied by each of said conductive spacers. - View Dependent Claims (12, 13, 14, 15)
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16. An active matrix display device comprising:
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a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having an opening with a part of said second interlayer insulating film remaining in said opening;
a second conductive film provided on said second interlayer insulating film and in said opening;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between said first substrate and said second substrate;
wherein said first conductive film is connected with said second conductive film in said opening, wherein at least one of said conductive spacers is held over said part of said second interlayer insulating film and in contact with both said second conductive film and conductive film. - View Dependent Claims (17, 18, 19, 20)
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21. An active matrix display device comprising:
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a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said conductive film, said second interlayer insulating film having an opening with a part of said second interlayer insulating film remaining in said opening;
a second conductive film provided on said second interlayer insulating film and in said opening;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between said first substrate and said second substrate;
wherein said first conductive film is connected with said second conductive film in said opening, wherein said conductive spacers are dispersed into a sealing material, wherein at least one of said conductive spacers is held over said part of said second interlayer insulating film and in contact with both said second conductive film and said third conductive film. - View Dependent Claims (22, 23, 24, 25)
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26. An active matrix display device comprising:
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a first substrate;
a first interlayer insulating film provided over said first substrate;
a first conductive film provided on said first interlayer insulating film;
a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having an opening with a part of said second interlayer insulating film remaining in said opening;
a second conductive film provided on said second interlayer insulating film and in said opening;
a second substrate opposed to said first substrate;
a third conductive film provided on said second substrate; and
a plurality of conductive spacers held between siad first substrate and said second susbtrate;
wherein said first conductive film is connected with said second conductive film in said opening, wherein at least one of said conductive spacers is held over said part of said second interlayer insulating film and in conatact with both said second conductive film and said third conductive film, wherein said opening occupies an area larger than an area occupied by each of said conductive spacers. - View Dependent Claims (27, 28, 29, 30)
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Specification
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Current AssigneeShunpei Yamazaki, Yoshiharu Hirakata
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Original AssigneeShunpei Yamazaki, Yoshiharu Hirakata
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InventorsHirakata, Yoshiharu, Yamazaki, Shunpei
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current349/155
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CPC Class CodesG02F 1/13392 spacers dispersed on the ce...G02F 1/13396 Spacers having different sizesG02F 1/1345 Conductors connecting elect...G02F 1/13452 Conductors connecting drive...
