Probe station

• US 20020027434A1
• Filed: 06/12/2001
• Published: 03/07/2002
• Est. Priority Date: 09/05/2000
• Status: Active Grant

• Current Assignee: FormFactor Incorporated
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Dunklee, John, Nordgren, Greg
• Granted Patent: US 6,914,423 B2
• Time in Patent Office: Days
• US Class Current: 324/158.1
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06
• CPC Class Codes: G01R 31/2887 involving moving the probe head or the IC under test; docking stations moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392
• CPC Class Codes: Y10T 279/29 More than one set of gripping means

Abstract

A probe station for testing a wafer.

Claims

1. A probe station comprising a chuck which rotates with respect to an auxiliary chuck.