System for validating and monitoring semiconductor testing tools
First Claim
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1. A system for monitoring semiconductor testing tools comprising:
- a tester testing a semiconductor device, whereby a test result is derived;
a storage device storing a logic function corresponding to the semiconductor device; and
a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.
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Abstract
A system for monitoring semiconductor testing tools comprises a tester testing a semiconductor device, whereby a test result is derived, a storage device storing a logic function corresponding to the semiconductor device, and a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.
1 Citation
21 Claims
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1. A system for monitoring semiconductor testing tools comprising:
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a tester testing a semiconductor device, whereby a test result is derived;
a storage device storing a logic function corresponding to the semiconductor device; and
a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for validating semiconductor test tools using a semiconductor device which a first test result has been derived from and validated, the system comprising:
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a tester testing the semiconductor device, whereby a second test result is derived;
a storage device storing the first test result of the semiconductor device; and
a processor receiving the first and second test result from the storage device and tester respectively, and comparing the first and second test result for validation of the second test result. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification