Electronic circuit
First Claim
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1. A display device comprising:
- a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising a conductive oxide film electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum, and the third conductive layer comprises titanium.
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Abstract
An electronic circuit formed on an insulating substrate and having thin-film transistors (TFTs) comprising semiconductor layers. The thickness of the semiconductor layers is less than 1500 Å, e.g., between 100 and 750 Å. A first layer consisting mainly of titanium and nitrogen is formed on the semiconductor layer. A second layer consisting aluminum is formed on top of the first layer. The first and second layers are patterned into conductive interconnects. The bottom surface of the second layer is substantially totally in intimate contact with the first layer. The interconnects have good contacts with the semiconductor layer.
65 Citations
72 Claims
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1. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising a conductive oxide film electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum, and the third conductive layer comprises titanium. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising indium tin oxide electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum, and the third conductive layer comprises titanium. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 20, 21, 22, 23, 24, 25, 26, 27, 29, 30, 31, 32, 33, 34, 35, 36, 38, 39, 40, 41, 42, 43, 44, 45, 47, 48, 49, 50, 51, 52, 53, 54)
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19. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer having a thickness less than 1500 Å
, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising a conductive oxide film electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum, and the third conductive layer comprises titanium.
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28. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising a conductive oxide film electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum having a thickness of 5000 Å
or less, and the third conductive layer comprises titanium.
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37. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer having a thickness less than 1500 Å
, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising indium tin oxide electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum, and the third conductive layer comprises titanium.
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46. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising indium tin oxide electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum having a thickness of 5000 Å
or less, and the third conductive layer comprises titanium.
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55. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer having a thickness less than 1500 Å
, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising a conductive oxide film electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum having a thickness of 5000 Å
or less, and the third conductive layer comprises titanium. - View Dependent Claims (56, 57, 58, 59, 60, 61, 62, 63)
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64. A display device comprising:
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a thin film transistor over a substrate, the thin film transistor comprising a semiconductor layer having a thickness less than 1500 Å
, and a gate electrode with a gate insulating film interposed therebetween; and
a pixel electrode comprising indium tin oxide electrically connected to the semiconductor layer through an electrode, the electrode having a laminate structure comprising a first conductive layer in contact with the semiconductor layer, a second conductive layer formed on the first conductive layer, and a third conductive layer formed on the second conductive layer and in contact with the pixel electrode, wherein the first conductive layer comprises titanium, the second conductive layer comprises aluminum having a thickness of 5000 Å
or less, and the third conductive layer comprises titanium. - View Dependent Claims (65, 66, 67, 68, 69, 70, 71, 72)
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Specification