Method for fabricating metal interconnects

• US 20030092257A1
• Filed: 11/27/2001
• Published: 05/15/2003
• Est. Priority Date: 11/09/2001
• Status: Abandoned Application

• Current Assignee: Macronix International Co., Ltd.
• Original Assignee: Macronix International Co., Ltd.
• Inventors: Cheng, Chih-Hsien
• Application Number:
  US09/997,353
• Publication Number:
  US 20030092257A1
• Time in Patent Office: Days
• US Class Current: 438/633
• CPC Class Codes: C25D 11/34 of metals or alloys not provided for in groups C25D11/04 - C25D11/32
• CPC Class Codes: H01L 21/2885 using an external electrical current, i.e. electro-deposition
• CPC Class Codes: H01L 21/76856 by treatment in plasmas or gaseous environments, e.g. nitriding a refractory metal liner
• CPC Class Codes: H01L 21/76877 Filling of holes, grooves or trenches, e.g. vias, with conductive material

Abstract

A method for fabricating metal interconnects, in which a dielectric layer is formed over a substrate and then an opening is formed in the dielectric layer, is described. A metal layer is formed to fill the opening and then a protective layer is form on the surface of the metal layer by an electrochemical method. Thereafter, the protective layer and the metal layer outside the opening are removed to complete the metal interconnect process. Since the protective layer is more stable than the metal layer so that oxidation of the metal layer can be prevented, the queue time (Q-time) between the metal deposition process and the chemical mechanical polishing (CMP) process can be increased with more flexibility.

Claims

1. A method for fabricating metal interconnects, comprising the steps of:

providing a substrate on which a dielectric layer is formed;

forming an opening in the dielectric layer;

forming a metal layer on the substrate to fill the opening;

forming a protective layer on the metal layer; and

removing the protective layer and the metal layer outside the opening.

2. The method of claim 1, wherein the opening comprises a dual damascene opening.

3. The method of claim 1, wherein the opening comprises a trench.

4. The method of claim 1, wherein the opening comprises a via hole.

5. The method of claim 1, wherein the opening comprises a contact hole.

6. The method of claim 1, wherein the opening comprises a damascene opening.

7. The method of claim 1, wherein the metal layer comprises copper.

8. The method of claim 1, wherein the protective layer comprises cuprous oxide (Cu₂O).

9. The method of claim 1, wherein the protective layer is formed by an electrochemical method that uses an electroplating solution comprising an aqueous solution containing 0.1M dibasic sodium phosphate (Na₂HPO₄) and 10% methanol (CH₃OH).

10. The method of claim 9, wherein the electroplating solution has a pH value of about 7 to about 9.

11. The method of claim 1, further comprising forming a conformal barrier layer on the substrate after the opening is formed and before the metal layer is formed.

12. A method for fabricating metal interconnects, comprising the steps of:

providing a substrate with a dielectric layer formed thereon;

forming an opening in the dielectric layer;

forming a copper layer on the substrate to fill the opening;

forming a cuprous oxide protective layer on a surface of the copper layer; and

removing the cuprous oxide protective layer and the copper layer outside the opening.

13. The method of claim 12, wherein the opening comprises a dual damascene opening.

14. The method of claim 12, wherein the opening comprises a trench.

15. The method of claim 12, wherein the opening comprises a via hole.

16. The method of claim 12, wherein the opening comprises a contact hole.

17. The method of claim 12, wherein the opening comprises a damascene opening.

18. The method of claim 12, wherein forming the cuprous oxide protective layer comprises an electrochemical method.

19. The method of claim 18, wherein an electroplating solution used in the electrochemical method for forming the cuprous oxide protective layer comprises an aqueous solution containing 0.1M dibasic sodium phosphate (Na₂HPO₄) and 10% methanol.

20. The method of claim 19, wherein the electroplating solution has a pH value of about 7 to about 9.