Nanopore system using nanotubes and C60 molecules

• US 20030215376A1
• Filed: 05/17/2002
• Published: 11/20/2003
• Est. Priority Date: 05/17/2002
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Chopra, Nasreen G.
• Granted Patent: US 6,919,002 B2
• Time in Patent Office: Days
• US Class Current: 422/311
• CPC Class Codes: B01D 67/003 by selective elimination of components, e.g. by leaching
• CPC Class Codes: B01D 69/02 characterised by their properties
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C12Q 1/6825 Nucleic acid detection involving sensors
• CPC Class Codes: C12Q 1/6869 Methods for sequencing
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68
• CPC Class Codes: Y10S 977/781 Possessing nonosized surface openings that extend partially into or completely through the host material

Abstract

A nanopore system, and manufacturing method therefor, is provided with a substrate having a support material over the substrate. A nano-structure in the support material forms a nanopore.

Claims

1. A method for manufacturing a nanopore system comprising:

providing a nano-structure over a substrate;

embedding the nano-structure in a support material; and

processing the nano-structure to form a nanopore.

2. The method as claimed in claim 1 wherein processing the nano-structure includes removing the nano-structure from the support material.

3. The method as claimed in claim 1 wherein providing the nano-structure includes:

forming pillars on the substrate;

placing a catalyst precursor on the pillars; and

depositing a nanotube on the pillars.

4. The method as claimed in claim 1 wherein:

providing the nano-structure includes providing a spherical molecule; and

processing the nano-structure includes removing the support material above the spherical molecule.

5. The method as claimed in claim 1 including:

processing the substrate and the support material to form parallel surfaces with a surface intersecting the nano-structure.

6. The method as claimed in claim 1 including:

processing the substrate and the support material to form parallel surfaces with the support material having a relief provided therein intersecting the nano-structure.

7. The method as claimed in claim 1 including:

processing the substrate to a first size; and

processing the support material to a second size smaller than the first size.

8. The method as claimed in claim 1 including:

bonding a support frame on the support material.

9. The method as claimed in claim 1 including:

forming means around the support material for translocating molecules through the nanopore.

10. The method as claimed in claim 1 including:

forming a further material around the support material for translocating molecules through the nanopore; and

providing an electronic detection system for electronically sensing translocating molecules in the nanopore.

11. A method for manufacturing a nanopore system comprising:

providing a carbon nano-structure over a silicon substrate;

embedding the carbon nano-structure in a matrix material; and

processing the carbon nano-structure to form a nanopore.

12. The method as claimed in claim 11 wherein processing the carbon nano-structure includes removing the carbon nano-structure from the matrix material by exposing to oxygen.

13. The method as claimed in claim 11 wherein providing the carbon nano-structure includes:

forming pillars on the silicon substrate;

placing a catalyst precursor on the pillars, the catalyst precursor conditioned to favor enhanced directional growth; and

growing a carbon nanotube on the pillars.

14. The method as claimed in claim 11 wherein:

providing the carbon nano-structure includes;

providing a C₆₀ molecule,

dispensing the C₆₀ molecule in a solvent onto the silicon substrate, and

evaporating the solvent; and

processing the carbon nano-structure includes;

removing the matrix material above the C₆₀ molecule,

removing the substrate below the C₆₀ molecule, and

exposing the C₆₀ molecule to oxygen.

15. The method as claimed in claim 11 including:

processing the silicon substrate and the matrix material to form parallel surfaces with a surface intersecting the carbon nano-structure.

16. The method as claimed in claim 11 including:

processing the silicon substrate and the matrix material to form parallel surfaces with the matrix material having a relief provided therein intersecting the carbon nano-structure.

17. The method as claimed in claim 11 including:

processing the silicon substrate to a first size; and

processing the matrix material to a second size smaller than the first size.

18. The method as claimed in claim 11 including:

bonding a support frame on a first surface of the matrix material, the matrix material having an opening provided therein adjacent the carbon nano-structure; and

processing the matrix material to form a second surface proximate the first surface.

19. The method as claimed in claim 11 including:

forming means around the matrix material for translocating biological polymer molecules through the nanopore.

20. The method as claimed in claim 11 including:

forming a further material around the matrix material for containing biological polymer molecules;

providing a mechanism for translocating biological polymer molecules through the nanopore; and

providing an electronic detection system for electronically reading translocating biological polymer molecules in the nanopore.

21. A nanopore system comprising:

a substrate;

a support material over the substrate; and

a nano-structure in the support material formed into a nanopore.

22. The nanopore system as claimed in claim 21 wherein the nano-structure is absent from the support material leaving a larger nanopore.

23. The nanopore system as claimed in claim 21 wherein the nano-structure includes:

pillars on the substrate;

a catalyst precursor on the plurality of pillars; and

a nanotube on the plurality of pillars.

24. The nanopore system as claimed in claim 21 wherein:

the nano-structure is a spherical molecule; and

the support material is absent above the spherical molecule.

25. The nanopore system as claimed in claim 21 wherein:

the substrate and the support material have parallel surfaces with a surface intersecting the nano-structure.

26. The nanopore system as claimed in claim 21 wherein:

the substrate and the support material have parallel surfaces with the support material having a relief provided therein intersecting the nano-structure.

27. The nanopore system as claimed in claim 21 wherein:

the substrate is a first size; and

the support material is a second size smaller than the first size.

28. The nanopore system as claimed in claim 21 including:

a support frame on the support material.

29. The nanopore system as claimed in claim 21 including:

a further material around the support material for translocating molecules through the nanopore.

30. The nanopore system as claimed in claim 21 including:

a further material around the support material for translocating molecules through the nanopore; and

an electronic detection system for electronically sensing translocating molecules in the nanopore.

31. A nanopore system comprising:

a silicon substrate;

a matrix material over the silicon substrate; and

a carbon nano-structure formed into a nanopore.

32. The nanopore system as claimed in claim 31 wherein the carbon nano-structure is absent from the matrix material leaving a larger nanopore.

33. The nanopore system as claimed in claim 31 wherein providing the carbon nano-structure includes:

pillars on the silicon substrate;

a catalyst precursor on the plurality of pillars, the catalyst precursor conditioned to favor enhanced directional growth; and

a carbon nanotube on the plurality of pillars.

34. The nanopore system as claimed in claim 31 wherein:

the matrix material has a C₆₀ molecule-sized nanopore provided there through.

35. The nanopore system as claimed in claim 31 wherein:

the carbon nano-structure is a carbon nanotube; and

the silicon substrate and the matrix material have parallel surfaces with the parallel surfaces intersecting the carbon nanotube.

36. The nanopore system as claimed in claim 31 wherein:

the carbon nano-structure is a carbon nanotube; and

the silicon substrate and the matrix material to form parallel surfaces with the matrix material having a relief provided therein intersecting the carbon nanotube.

37. The nanopore system as claimed in claim 31 wherein:

the silicon substrate is of a first size; and

the matrix material is of a second size smaller than the first size, the matrix material having a nanotube extending therethrough.

38. The nanopore system as claimed in claim 31 including:

a support frame bonded on a first surface of the matrix material, the matrix material having an opening provided therein adjacent the carbon nano-structure; and

the matrix material having a second surface proximate the first surface intersecting the carbon nano-structure.

39. The nanopore system as claimed in claim 31 including:

means around the matrix material for translocating biological polymer molecules through the nanopore.

40. The nanopore system as claimed in claim 31 including:

a further material around the matrix material for containing biological polymer molecules;

a mechanism for translocating biological polymer molecules through the nanopore; and

an electronic detection system for electronically reading translocating biological polymer molecules in the nanopore.