Nanopore system using nanotubes and C60 molecules
First Claim
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1. A method for manufacturing a nanopore system comprising:
- providing a nano-structure over a substrate;
embedding the nano-structure in a support material; and
processing the nano-structure to form a nanopore.
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Abstract
A nanopore system, and manufacturing method therefor, is provided with a substrate having a support material over the substrate. A nano-structure in the support material forms a nanopore.
36 Citations
38 Claims
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1. A method for manufacturing a nanopore system comprising:
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providing a nano-structure over a substrate;
embedding the nano-structure in a support material; and
processing the nano-structure to form a nanopore. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing a nanopore system comprising:
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providing a carbon nano-structure over a silicon substrate;
embedding the carbon nano-structure in a matrix material; and
processing the carbon nano-structure to form a nanopore. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A nanopore system comprising:
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a substrate;
a support material over the substrate; and
a nano-structure in the support material formed into a nanopore. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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30. A nanopore system comprising:
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a silicon substrate;
a matrix material over the silicon substrate; and
a carbon nano-structure formed into a nanopore. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38)
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Specification