Microelement piezoelectric feedback type picking and releasing device

• US 20030234594A1
• Filed: 06/21/2002
• Published: 12/25/2003
• Est. Priority Date: 06/21/2002
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Cheng, Chih-Yung, Liu, Ping-Yin, Tsai, Hung-Yin
• Granted Patent: US 6,710,512 B2
• Time in Patent Office: Days
• US Class Current: 310/313.00R
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: B81C 99/002 Apparatus for assembling MEMS, e.g. micromanipulators micromanipulators per se B25J7/00
• CPC Class Codes: H10N 30/302 Sensors

Abstract

A microelement piezoelectric feedback type picking and releasing device is constructed to include a piezoelectric material, an IDT (interdigital transducer) electrode plated and a progressive electrode plated on the piezoelectric material, the progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction, the IDT electrode forming a releasing unit by means of surface acoustic wave/ultrasonic wave and serving as a voltage signal feedback sensor for clamping force control.

Claims

1. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material and an interdigital transducer electrode plated on said piezoelectric material.

2. The microelement piezoelectric feedback type picking and releasing device as claimed in claim 1, wherein said interdigital transducer electrode forms a releasing unit by means of surface acoustic wave/ultrasonic wave.

3. The microelement piezoelectric feedback type picking and releasing device as claimed in claim 1, wherein said interdigital transducer electrode serves as a voltage signal feedback sensor, forming a clamping force control unit. 4.

4. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material, and a progressive electrode plated on said piezoelectric material, said progressive electrode having a plurality of electrode elements of different sizes arranged in proper order in one direction.

5. A microelement piezoelectric feedback type picking and releasing device comprising a piezoelectric material, an interdigital transducer electrode plated on said piezoelectric material, and a progressive electrode plated on said piezoelectric material, said progressive electrode comprising a plurality of electrode elements of different sizes arranged in proper order in one direction.

6. The microelement piezoelectric feedback type picking and releasing device as claimed in claim 5, wherein said interdigital transducer electrode forms a releasing unit by means of surface acoustic wave/ultrasonic wave.

7. The microelement piezoelectric feedback type picking and releasing device as claimed in claim 5, wherein interdigital transducer electrode serves as a voltage signal feedback sensor, forming a clamping force control unit.