Polishing pad with window for planarization
First Claim
Patent Images
1. A polishing pad comprising:
- a. a first layer having an opening; and
b. a second layer wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein said first layer is at least partially connected to said second layer, and wherein said first layer absorbs at least two percent by weight of polishing slurry based on total weight of said first layer.
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Abstract
The present invention relates to a polishing pad. In particular, the polishing pad of the present invention can include a window. The polishing pad of the present invention can be useful for polishing articles and can be especially useful for chemical mechanical polishing or planarization of a microelectronic device, such as a semiconductor wafer. The window of the polishing pad is at least partially transparent and thus, can be particularly useful with polishing or planarizing tools that are equipped with through-the-platen wafer metrology.
47 Citations
68 Claims
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1. A polishing pad comprising:
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a. a first layer having an opening; and
b. a second layer wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein said first layer is at least partially connected to said second layer, and wherein said first layer absorbs at least two percent by weight of polishing slurry based on total weight of said first layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 27)
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20. A polishing pad comprising:
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a. a first layer having an opening; and
b. a second layer wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein said first layer is at least partially connected to said second layer, and wherein said first layer has a porosity of at least two percent by volume based on total volume of said first layer. - View Dependent Claims (21, 22, 23, 24, 25, 26, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A polishing pad comprising:
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a. a first layer having an opening; and
b. a second layer wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein said first layer is at least partially connected to said second layer, and wherein said first layer has a percent volume compressibility greater than said second layer. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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- 59. A method of preparing a polishing pad comprising at least partially connecting a first layer having an opening to a second layer, wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein said first layer absorbs at least two percent by weight of polishing slurry based on total weight of said first layer.
- 62. A method of preparing a polishing pad comprising at least partially connecting a first layer having an opening to a second layer, wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein said first layer has a porosity of at least two percent by volume based on total volume of said first layer.
- 65. A method of preparing a polishing pad comprising at least partially connecting a first layer having an opening to a second layer, wherein at least a portion of said second layer comprises an at least partially transparent window, and wherein first layer has a percent volume compressibility greater than said second layer.
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68. A polishing pad comprising:
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a. a first layer having an opening;
b. a second layer wherein at least a portion of said second layer comprises an at least partially transparent window; and
c. a third layer having an opening, wherein said first layer is at least partially connected to said second layer and said second layer is at least partially connected to said third layer, and wherein said third layer is softer than said first layer.
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Specification