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Method for locating the center of a fiducial mark

  • US 20040109599A1
  • Filed: 05/12/2003
  • Published: 06/10/2004
  • Est. Priority Date: 12/10/2002
  • Status: Abandoned Application
First Claim
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1. A method for calculating the center of a fiducial mark contained in an image, comprising the steps of:

  • (a) defining a certain region covering every fiducial mark in the image;

    (b) segmenting a region covering each fiducial mark within the certain region;

    (c) locating the center of the fiducial mark within the region covering each fiducial mark to pixel accuracy; and

    (d) locating the center of the fiducial mark within the region covering each fiducial mark to sub-pixel accuracy based on the center of the fiducial mark located by step (c)

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