Method for locating the center of a fiducial mark
First Claim
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1. A method for calculating the center of a fiducial mark contained in an image, comprising the steps of:
- (a) defining a certain region covering every fiducial mark in the image;
(b) segmenting a region covering each fiducial mark within the certain region;
(c) locating the center of the fiducial mark within the region covering each fiducial mark to pixel accuracy; and
(d) locating the center of the fiducial mark within the region covering each fiducial mark to sub-pixel accuracy based on the center of the fiducial mark located by step (c)
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Abstract
In a method for locating the center of a fiducial mark contained in an image, a certain region covering every fiducial mark in the image is defined. A region containing each fiducial mark within the certain region is extracted. The center of the fiducial mark within the region containing each fiducial mark is located to pixel accuracy. The center of the fiducial mark within the region containing each fiducial mark is located to sub-pixel accuracy according to the pixel level locating of the center of the fiducial mark.
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10 Claims
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1. A method for calculating the center of a fiducial mark contained in an image, comprising the steps of:
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(a) defining a certain region covering every fiducial mark in the image;
(b) segmenting a region covering each fiducial mark within the certain region;
(c) locating the center of the fiducial mark within the region covering each fiducial mark to pixel accuracy; and
(d) locating the center of the fiducial mark within the region covering each fiducial mark to sub-pixel accuracy based on the center of the fiducial mark located by step (c) - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification