Wafer carrying robot teaching method and teaching plate
First Claim
1. A method for teaching a wafer carrying robot to carry a wafer placed and held in a predetermined place out of the place or to carry a wafer in a predetermined place, comprising the steps of:
- providing a positioning mark on the hand of the wafer carrying robot, arranging a teaching plate at a predetermined place, the teaching plate having a camera for pickup of the positioning mark, making the camera take a photograph of the positioning mark, correcting the position of the hand by an operator'"'"'s operation so that the positioning mark occupies a predetermined position in the image picked up by the camera, and positioning the hand in a horizontal plane.
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Accused Products
Abstract
A method for teaching a water carrying robot which employs a simple, inexpensive apparatus and is capable of not only maintaining a clean condition inside a front end but also effecting a saving of teaching work.
A positioning mark (3) is provided on the hand (2) of a wafer carrying robot (1) and a teaching plate (5) having a camera (6) for pickup of the positioning mark (3) is arranged at a predetermined position. The positioning mark (3) is photographed by the camera (6) and an operator corrects the position of the hand (2) so that the positioning mark (3) occupies a predetermined position in an image of the camera (6) and positions the hand (2) in a horizontal plane.
32 Citations
8 Claims
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1. A method for teaching a wafer carrying robot to carry a wafer placed and held in a predetermined place out of the place or to carry a wafer in a predetermined place, comprising the steps of:
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providing a positioning mark on the hand of the wafer carrying robot, arranging a teaching plate at a predetermined place, the teaching plate having a camera for pickup of the positioning mark, making the camera take a photograph of the positioning mark, correcting the position of the hand by an operator'"'"'s operation so that the positioning mark occupies a predetermined position in the image picked up by the camera, and positioning the hand in a horizontal plane. - View Dependent Claims (2, 6)
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3. A method for teaching a wafer carrying robot to carry a wafer placed and held in a predetermined place out of the place or to carry a wafer in a predetermined place, comprising the steps of:
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providing a positioning mark on the hand of the wafer carrying robot, arranging a teaching plate at a predetermined place, the teaching plate having a camera for pickup of the positioning mark, making the camera take a photograph of the positioning mark, measuring the difference between the position of the positioning mark in the image of the positioning mark photographed by the camera and the position of the positioning mark in the image obtained when the hand is properly positioned, automatically correcting the position of the hand using the difference measured, and carrying out the positioning of the hand in the horizontal plane. - View Dependent Claims (4, 5)
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7. A teaching plate, having:
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a configuration and dimensions wherein the same positioning can be carried out with the actual wafer, and a camera for pickup of a mark for positioning the hand of a wafer carrying robot. - View Dependent Claims (8)
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Specification