Frequency encoding of resonant mass sensors

• US 20050016276A1
• Filed: 06/04/2004
• Published: 01/27/2005
• Est. Priority Date: 06/06/2003
• Status: Abandoned Application

• Current Assignee: Palo Alto Sensor Technology Innovation
• Original Assignee: Palo Alto Sensor Technology Innovation
• Inventors: Guan, Shenheng, Nielsen, Ralph B.
• Application Number:
  US10/861,583
• Publication Number:
  US 20050016276A1
• Time in Patent Office: Days
• US Class Current: 73/579
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0422 Shear waves, transverse waves, horizontally polarised waves
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/0426 Bulk waves, e.g. quartz crystal microbalance, torsional waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 2291/0428 Mode conversion
• CPC Class Codes: G01N 2291/106 one or more transducer arrays
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves

Abstract

A method for the detection of analytes using resonant mass sensors or sensor arrays comprises frequency encoding each sensor element, acquiring a time-domain resonance signal from the sensor or sensor array as it is exposed to analyte, detecting change in the frequency or resonant properties of each sensor element using a Fourier transform or other spectral analysis method, and classifying, identifying, and/or quantifying analyte using an appropriate data analysis procedure. Frequency encoded sensors or sensor arrays comprise sensor elements with frequency domain resonance signals that can be uniquely identified under a defined range of operating conditions. Frequency encoding can be realized either by fabricating individual sensor elements with unique resonant frequencies or by tuning or modifying identical resonant devices to unique frequencies by adding or removing mass from individual sensor elements. The array of sensor elements comprises multiple resonant structures that may have identical or unique sensing layers. The sensing layers influence the sensor elements'"'"' response to analyte. Time-domain signal is acquired, typically in a single data acquisition channel, and typically using either (1) a pulsed excitation followed by acquisition of the free oscillatory decay of the entire array or (2) a rapid scan acquisition of signal from the entire array in a direct or heterodyne configuration. Spectrum analysis of the time domain data is typically accomplished with Fourier transform analysis. The methods and sensor arrays of the invention enable rapid and sensitive analyte detection, classification and/or identification of complex mixtures and unknown compounds, and quantification of known analytes, using sensor element design and signal detection hardware that are robust, simple and low cost.

Claims

1. A method for the detection of analytes by use of resonant sensors or sensor arrays, the method comprising:

frequency encoding multiple sensor elements of the sensor array;

acquiring frequency spectral data for the array as it is exposed to analyte; and

classifying, identifying, and/or quantifying analyte by use of an appropriate data analysis procedure.

2. The method of claim 1 wherein the resonant sensor array comprises an array of piezoelectric elements or cantilever elements.

3. The method of claim 2 wherein the piezoelectric elements are tuning fork elements, thickness shear mode (TSM) or quartz crystal microbalance (QCM) elements, or surface acoustic wave (SAW) elements.

4. The method of claim 1 wherein multiple frequency encoded sensor elements are derived from initially identical devices that are modified such that their resonant signals can be identified under sensing conditions.

5. The method of claims 3 or 4 wherein an array of piezoelectric tuning fork sensors is frequency encoded by shortening tines of initially identical sensor elements to different lengths to separate their resonant frequencies.

6. The method of claim 3 or 4 wherein an array of tuning fork sensors, an array of thickness shear mode (TSM) or quartz crystal microbalance (QCM) sensors, or an array of surface acoustic wave (SAW) sensors is frequency encoded by depositing different thicknesses of rigid material on individual sensor elements to separate their frequencies.

7. The method of claim 6 wherein an array of tuning fork sensors or an array of thickness shear mode (TSM) or quartz crystal microbalance (QCM) sensors is frequency encoded by electroplating different thicknesses of rigid metal on one or more electrodes of individual sensor elements to separate their frequencies.

8. The method of claim 1 wherein multiple frequency encoded sensor elements are derived from devices fabricated with unique, resolvable resonant frequencies.

9. The method of claim 8 wherein a frequency encoded tuning fork sensor array comprises multiple resonant sensor elements microfabricated with unique geometries.

10. The method of claim 8 wherein a frequency encoded thickness shear mode (TSM) or quartz crystal microbalance (QCM) sensor array comprises sensor elements with unique substrate thicknesses or unique deposited electrode thicknesses.

11. The method of claim 8 wherein a frequency encoded surface acoustic wave (SAW) sensor array comprises sensor elements with unique interdigitated electrode spacing.

12. The method of claim 1 wherein frequency spectral data is acquired by a pulse/acquisition method comprising:

pulsing the sensor array with an excitation waveform;

acquiring time domain free oscillation decay (FOD) signal;

converting the time domain signal into frequency data.

13. The method of claim 1 wherein frequency spectral data is acquired by a rapid scan method comprising:

applying an excitation waveform to the sensor array;

acquiring time domain signal simultaneously with application of the excitation waveform;

converting the time domain signal into frequency data.

14. The method of claim 1 wherein frequency spectral data is acquired by a-frequency sweeping method comprising:

exciting the sensor array with a frequency sweep signal which varies in frequency over time;

acquiring the array'"'"'s frequency response simultaneously with the excitation sweep.

15. The method of claim 1 wherein acquisition of frequency spectral data from the frequency encoded sensor array comprises recording a signal from the array as individual sensor elements are driven by individual oscillators dedicated to each sensor element.

16. The method of claim 12, 13, 14, or 15 wherein acquisition of signal from the encoded array is carried out in either a direct mode or a heterodyne mode.

17. The method of claim 12, 13, or 14 wherein excitation of the sensor array is carried out in a direct mode or in a heterodyne mode.

18. The method of claim 12 or 13 wherein the excitation waveform is a stored waveform inverse Fourier transform (SWIFT) waveform.

19. The method of claim 12 or 13 wherein the excitation waveform is a frequency sweep or chirp waveform.

20. The method of claim 12 or 13 wherein the excitation waveform is an impulse waveform.

21. The method of claim 12 wherein time domain signal is converted into frequency data using fast Fourier transform (FFT).

22. The method of claim 1 wherein the analyte comprises gas phase chemical vapors.

23. The method of claim 1 or 22 wherein various sensor elements of the sensor array each comprise unique sensing layers comprising unique polymers or other sensing materials.

24. The method of claim 1, 2 or 23 wherein data analysis procedures for classifying, identifying, or quantifying analyte comprise

extracting resonant peak information for each sensor element including peak frequency

classifying, identifying, and/or quantifying analyte by use of a multivariate data analysis procedure.

25. The method of claim 1 wherein the analyte is in liquid phase.

26. The method of claim 3 wherein tuning fork sensor elements are connected to form a two-port equivalent device by parallel connection.

27. The method of claim 3 wherein thickness shear mode (TSM) or quartz crystal microbalance (QCM) sensor elements are connected to form a two-port equivalent device by parallel connection, serial connection, or serial connection with capacitor ladder.

28. The method of claim 3 wherein thickness shear mode (TSM) or quartz crystal microbalance (QCM) sensor elements are connected to form a two-port equivalent device by parallel connection through a directional coupler.

29. A frequency encoded resonant sensor array comprising multiple sensor elements that produce unique, identifiable resonance signals at different frequencies.

30. The array of claim 29 wherein each sensor element comprises a resonant device and a sensing layer.

31. The array of claim 29 wherein the sensor elements comprise piezoelectric resonant elements.

32. The array of claim 31 wherein the sensor elements comprise tuning fork elements, thickness shear mode (TSM) or quartz crystal microbalance (QCM) elements, or surface acoustic wave (SAW) elements.

33. The array of claim 29 wherein the sensor elements are derived from initially identical devices that are modified such that their resonant signals can be resolved under sensing conditions.

34. The array of claim 29 wherein the sensor elements are derived from devices fabricated with unique, resolvable resonant frequencies.

35. The array of claim 29 or claim 32 comprising four (4) or more sensor elements.

36. The array of claim 29 or claim 32 comprising ten (10) or more sensor elements.

37. The array of claim 29 or claim 32 comprising twenty (20) or more sensor elements.

38. They array of claim 30 wherein multiple sensor elements comprise unique sensing layers with diverse affinities toward analytes.

39. The array of claim 30 wherein multiple sensor elements comprise identical sensing layers with identical affinities toward analytes.

40. The array of claim 30 wherein multiple sensor elements comprise a combination of identical sensing layers with identical affinities and unique sensing layers with diverse affinities toward analytes

41. The array of claim 29 or claim 32 wherein multiple sensor elements are connected to form a two-port equivalent device.

42. The array of claim 29 wherein individual sensor elements are driven by individual oscillators dedicated to each sensor element.