Endpoint detector for a substrate manufacturing process

• US 20050127192A1
• Filed: 12/14/2004
• Published: 06/16/2005
• Est. Priority Date: 12/15/2003
• Status: Abandoned Application

• Current Assignee: Samsung Electronics Co. Ltd. (Samsung Group)
• Original Assignee: Samsung Electronics Co. Ltd. (Samsung Group)
• Inventors: Kim, Kiw-Sang, Chae, Seung-Ki, Kim, Yong-Jin, Huh, No-Hyun, Kang, Hyun-Kyu
• Application Number:
  US11/010,299
• Publication Number:
  US 20050127192A1
• Time in Patent Office: Days
• US Class Current: 236/1.C
• CPC Class Codes: G05D 23/1934 each space being provided with one sensor acting on one or more control means
• CPC Class Codes: G05D 23/22 the sensing element being a thermocouple

Abstract

An endpoint detector has a window, a first temperature control unit, a second temperature control unit and an analyzing unit. The window transmits light emitted from plasma in a processing chamber, and covers a passage through a sidewall of the processing chamber. The first temperature control unit maintains the window at a first temperature. The second temperature control unit maintains an inner surface of the passage at a second temperature, which is lower than the first temperature. The analyzing unit analyzes the light and determines an endpoint of a process in the processing chamber.

Claims

1. An apparatus for detecting an endpoint in a substrate processing, comprising:

a window covering a passage formed through a sidewall of a processing chamber in which the substrate processing is performed, the window transmitting light generated from plasma during the substrate processing;

an analyzing unit for analyzing the light to detect an endpoint of the substrate processing;

a first temperature control unit, thermally coupled to the window, for maintaining the window at a first temperature; and

a second temperature control unit, thermally coupled to an inner surface of the passage, for maintaining the inner surface of the passage at a second temperature, the second temperature being lower than the first temperature.

2. The apparatus as claimed in claim 1, wherein the window has a first surface that contacts an outer surface of the sidewall of the processing chamber and a second surface that is spaced apart from the processing chamber.

3. The apparatus as claimed in claim 2, wherein the first temperature control unit includes a ceramic heater that makes contact with the second surface of the window.

4. The apparatus as claimed in claim 3, wherein the ceramic heater is ring shaped, and an outer diameter of the ceramic heater is substantially identical to a diameter of the window.

5. The endpoint detector as claimed in claim 4, wherein the analyzing unit is disposed on the second surface of the window, and the analyzing unit extends through an inner surface of the ceramic heater.

6. The endpoint detector as claimed in claim 4, wherein the endpoint detector further comprises a window holder, an adapter and a fixing member, wherein the window holder grips the outer diameter of the window and an outer diameter of the ceramic heater, the adapter secures the window holder and the ceramic heater, and the fixing member secures the adapter, the ceramic heater and the window holder to the sidewall of the processing chamber.

7. The endpoint detector as claimed in claim 1, wherein the analyzing unit further comprises an optical probe, an optical emission spectrometer and an optical cable, wherein the optical probe is in communication with a center portion of the second surface of the window, the optical cable connects the optical probe to optical emission spectrometer, and the optical emission spectrometer analyzes the light to detect the endpoint of the process.

8. The endpoint detector as claimed in claim 3, wherein the endpoint detector further comprises a thermal sensor and a control part, wherein the thermal sensor measures a temperature of the window and the control part controls an operation of the ceramic heater in accordance with a temperature signal output from the thermal sensor to maintain the first temperature of the window.

9. The endpoint detector as claimed in claim 3, wherein the endpoint detector further comprises a thermal sensor and a control part, wherein the thermal sensor measures a temperature the ceramic heater and the control part controls an operation of the ceramic heater in accordance with a temperature signal output from the thermal sensor to maintain the first temperature of the window.

10. The endpoint detector as claimed in claim 1, wherein the second temperature control unit further comprises a coolant cycling channel, a coolant cycling pipe and a coolant cycling unit, wherein the coolant cycling channel is disposed around the passage, the coolant cycling channel controlling a temperature of the inner surface of the passage, the coolant cycling pipe is connected to the coolant cycling channel, and the coolant cycling unit circulates the coolant through the coolant cycling unit and the coolant cycling pipe.

11. The endpoint detector as claimed in claim 10, wherein the coolant includes a nitrogen gas, a helium gas or cooling water.

12. The endpoint detector as claimed in claim 10, wherein the second temperature control unit is installed on the coolant cycling pipe, and the second temperature control unit includes a heat exchanger for transmitting a heat from the coolant that flows in the coolant cycling pipe.

13. The endpoint detector as claimed in claim 10, wherein the endpoint detector further comprises an adiabatic member formed between the coolant cycling channel and an inside surface of the processing chamber.

14. The endpoint detector as claimed in claim 1, wherein the second temperature control unit further comprises a cooling channel for controlling a temperature of the inner surface of the passage, the cooling channel being formed around the view port and the cooling channel is connected to outside the processing chamber.

18. The endpoint detector as claimed in claim 14, wherein the cooling channel further comprises a cooling region having a ring shape and a plurality of openings for connecting the cooling region and to outside the processing chamber.

19. The endpoint detector as claimed in claim 1, wherein the passage comprises a view port extender coupling a view port formed in the sidewall of a processing chamber, the view port extender having a hole connecting to the view port.

20. The endpoint detector as claimed in claim 19, wherein the second temperature control unit winds around the view port extender, and the second temperature control unit has a coolant passageway for cycling a coolant.

21. The endpoint detector as claimed in claim 19, wherein the second temperature control unit includes a plurality of pins formed on the outer surface of the view port extender.

22. The endpoint detector as claimed in claim 1, wherein the passage comprises a view port formed in the sidewall.

15. The endpoint detector as claimed in claim 15, wherein the cooling channel further comprises a plurality of cooling pins formed in the cooling channel.

16. The endpoint detector as claimed in claim 15, wherein the cooling channel further comprises a cooling region having a ring shape, an inlet port and an outlet port, wherein the cooling region is disposed around the passage, the inlet port introduces external air to the cooling region, the outlet port exhausts the external air.

17. The endpoint detector as claimed in claim 16, wherein the cooling channel further comprises a fan supplying the external air to the cooling region.