Analytical scanning evanescent microwave microscope and control stage

• US 20060231756A1
• Filed: 06/14/2006
• Published: 10/19/2006
• Est. Priority Date: 09/20/1996
• Status: Abandoned Application

• Current Assignee: Intematix Corporation
• Original Assignee: Intematix Corporation
• Inventors: Yang, Hai Tao, Xiang, Xiao-Dong, Duewer, Fred, Gao, Chen
• Application Number:
  US11/454,171
• Publication Number:
  US 20060231756A1
• Time in Patent Office: Days
• US Class Current: 250/309
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.

Claims

1-53. -53. (canceled)

54. A method for measuring an electromagnetic property of a sample using an evanescent wave probe, the method comprising:

measuring probe parameters selected from the group consisting of resonant frequency shift and quality factor shift, wherein the resonant frequency shift and the quality factor shift results from an interactin between the sample and an evanscent electromagnetic field emitted from said probe.

55. The method for measuring an electromagnetic property according to claim 54, wherein the measurement is made using quasistatic approximation modeling.