Method for fabricating organic electroluminescent devices
First Claim
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1. A method for fabricating an organic electroluminescent device, comprising:
- providing a substrate;
forming a low temperature polysilicon thin film transistor (LTPS-TFT) including a channel region, a source electrode, and a drain electrode on the substrate;
forming an organic electroluminescent element on the substrate, wherein the organic electroluminescent element comprises an anode coupled to the drain electrode, wherein a method of forming the channel region comprises;
forming a polysilicon layer with a predetermined channel region; and
performing an ion-implantation into the predetermined channel region.
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Abstract
A method for fabricating organic electroluminescent elements comprising an LTPS-TFT as driving circuits. The method comprises providing a substrate, forming an LTPS-TFT on the substrate, and forming an OLED electrically connecting the LTPS-TFT. Specifically, the method for forming a channel region of the LTPS-TFT includes forming a polysilicon layer with a predetermined channel region, and performing an implantation process on the predetermined channel region.
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10 Claims
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1. A method for fabricating an organic electroluminescent device, comprising:
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providing a substrate;
forming a low temperature polysilicon thin film transistor (LTPS-TFT) including a channel region, a source electrode, and a drain electrode on the substrate;
forming an organic electroluminescent element on the substrate, wherein the organic electroluminescent element comprises an anode coupled to the drain electrode, wherein a method of forming the channel region comprises;
forming a polysilicon layer with a predetermined channel region; and
performing an ion-implantation into the predetermined channel region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification