Spatial light modulator with perforated hinge

• US 7,355,781 B2
• Filed: 07/19/2006
• Issued: 04/08/2008
• Est. Priority Date: 07/25/2005
• Status: Expired due to Fees

• Current Assignee: Gehode Corporation
• Original Assignee: Gehode Corporation
• Inventors: Mohn, Jonathan David
• Primary Examiner(s): Ben; Loha
• Application Number:
  US11/489,403
• Publication Number:
  US 20070019278A1
• Time in Patent Office: 629 Days
• Field of Search: 359290-293, 359/295, 359/298, 359/214, 359/224, 359/245, 353/30, 353/98, 353/99, 345/84, 345/87, 310/36, 310/309, 216/24, 735/040.2, 735/040.3
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A spatial light modulator (SLM) is disclosed that increases speed and efficiency of an SLM through the use of a perforated hinge. The hinge may take many forms, but generally includes an elongated body having holes therein along its longitudinal direction. One or more electrodes are charged with a predetermined voltage in order rotate a reflecting surface towards the electrodes through electrostatic attraction. The perforations within the hinge results in the hinge being made from less material so that it is less sensitive to hinge thickness variations that can occur during the manufacturing process. Consequently, the perforated hinge allows for more stable, uniform mirror rotation.

Claims

1. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes; and

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes wherein the perforated hinge includes an elongated body having holes therein.

2. The spatial light modulator of claim 1, wherein the holes are at least 10% of a width of the elongated body.

3. The spatial light modulator of claim 1, wherein the holes are a geometric shape including one or more of the following:

parallelograms, hexagons, squares, circles, or rectangles.

4. The spatial light modulator of claim 1, further comprising:

a spatial light modulator body having the one or more electrodes and opposing supports mounted thereto, the perforated hinge mounted to the opposing supports.

5. The spatial light modulator of claim 1, further including one or more spring fingers positioned between the reflecting surface and the electrodes to prevent contact there between.

6. The spatial light modulator of claim 1, wherein the one or more electrodes are single level or double level.

7. The spatial light modulator of claim 1, wherein the perforated hinge includes at least two, spaced-apart longitudinal members parallel to an axis of rotation of the reflecting surface.

8. The spatial light modulator of claim 7 including at least one cross member positioned between the longitudinal members.

9. The spatial light modulator of claim 1, wherein the perforated hinge includes at least three, spaced-apart, longitudinal members parallel to an axis of rotation of the reflecting surface.

10. The spatial light modulator of claim 1, wherein the perforated hinge includes two longitudinal sidewalls with two or more geometrical perforations positioned between the sidewalls.

11. The spatial light modulator of claim 1, wherein the perforated hinge includes two, equal-length longitudinal sidewalls forming a width there between of the perforated hinge, wherein the width of the hinge varies along its length.

12. The spatial light modulator of claim 1, wherein the perforated hinge is made of material whose fatigue lifetime exceeds 1.0e⁹ hinge deflection cycles.

13. The spatial light modulator of claim 12, wherein the material includes one of the following or a combination thereof:

copper, copper alloy, aluminum, aluminum alloy, single crystal silicon, amorphous silicon, polysilicon, silicon nitride, titanium, and titanium alloy.

14. The spatial light modulator of claim 1, wherein the perforated hinge is mounted to the reflecting surface along an edge of the reflecting surface or below the reflecting surface.

15. The spatial light modulator of claim 1, wherein the reflecting surface is mounted to the perforated hinge using one or more support posts.

16. A spatial light modulator comprising:

a perforated hinge including a body having a length (L) and a width (W), the body having two side walls defining the width with at least two holes positioned therein between the two side walls;

at least one support post coupled to the perforated hinge; and

a reflecting surface mounted on the support post.

17. The spatial light modulator of claim 16 wherein the holes have a width greater than 10% the width of the body.

18. The spatial light modulator of claim 16, wherein the spatial light modulator is included in an array of spatial light modulators within a display.

19. The spatial light modulator of claim 16, further including one or more electrodes, wherein the perforated hinge torsionally rotates in response to a first voltage level on the one or more electrodes to rotate the reflecting surface towards the one or more electrodes.

20. The spatial light modulator of claim 19, wherein the perforated hinge rotates back to its at-rest position with a second voltage level on the one or more electrodes.

21. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes;

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes; and

a spatial light modulator body having the one or more electrodes and opposing supports mounted thereto, the perforated hinge mounted to the opposing supports.

22. The spatial light modulator of claim 21, wherein the perforated hinge torsionally rotates in response to voltage applied to the one or more electrodes and wherein the perforated hinge returns to its at-rest position in absence of voltage applied to the one or more electrodes.

23. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes;

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes; and

one or more spring fingers positioned between the reflecting surface and the electrodes to prevent contact there between.

24. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes; and

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge includes at least two, spaced-apart longitudinal members parallel to an axis of rotation of the reflecting surface.

25. The spatial light modulator of claim 24, wherein the perforated hinge includes at least three, spaced-apart, longitudinal members parallel to an axis of rotation of the reflecting surface.

26. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes; and

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge includes two longitudinal sidewalls with two or more geometrical perforations positioned between the sidewalls.

27. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes; and

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge includes two, equal-length longitudinal sidewalls forming a width there between of the perforated hinge, wherein the width of the hinge varies along its length.

28. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes; and

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge is made of material whose fatigue lifetime exceeds 1.0e⁹ hinge deflection cycles and wherein the perforated hinge twists in response to voltage applied to the one or more electrodes.

29. A spatial light modulator, comprising:

a reflecting surface;

one or more electrodes; and

a perforated hinge coupled to the reflecting surface to allow rotation of the reflecting surface towards the one or more electrodes, wherein the perforated hinge is mounted to the reflecting surface along an edge of the reflecting surface or below the reflecting surface and wherein the perforated hinge twists in response to voltage applied to the one or more electrodes.