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Cascading metrology apparatus and methodology

  • US 20070073497A1
  • Filed: 06/23/2006
  • Published: 03/29/2007
  • Est. Priority Date: 09/29/2005
  • Status: Active Grant
First Claim
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1. A metrology device, comprising:

  • a first data combiner;

    a metrology board configured to produce energy related data; and

    a second data combiner;

    wherein said first data combiner is configured to serially combine data from a data source with data generated by said metrology board, and wherein said second data combiner is configured to combine combined data from said first data combiner so as to provide composite energy related data.

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