Apparatus and method for atomic layer cleaning and polishing

• US 20070095367A1
• Filed: 10/28/2005
• Published: 05/03/2007
• Est. Priority Date: 10/28/2005
• Status: Abandoned Application

• Current Assignee: Arulkumar Shanmugasundram, Dmitry Lubomirsky, Fang Mei, Van Nguyen, Yaxin Wang
• Original Assignee: Arulkumar Shanmugasundram, Dmitry Lubomirsky, Fang Mei, Van Nguyen, Yaxin Wang
• Inventors: Lubomirsky, Dmitry, Shanmugasundram, Arulkumar, Mei, Fang, Wang, Yaxin, Nguyen, Van
• Application Number:
  US11/262,445
• Publication Number:
  US 20070095367A1
• Time in Patent Office: Days
• US Class Current: 134/33
• CPC Class Codes: H01L 21/67046 using mainly scrubbing means, e.g. brushes

Abstract

The present invention generally provides an apparatus and method of processing substrates to uniformly remove any residual contamination from the surface of a substrate by use of an appropriate cleaning chemistry and contact with a cleaning medium. In one embodiment, the cleaning medium, such as is a brush or a scrubbing component that is positioned in a cleaning module. In one embodiment, the process of cleaning the surface of a substrate W is completed by “scrubbing” the surface of the substrate while using a cleaning solution that is selected to chemically etch a material from the surface of the substrate. In one aspect, the amount of material removed from the surface of a substrate is only about 10-30 Angstroms (Å). In one embodiment, the substrate surface is cleaned by use of a scrubbing process that uses a fluid that doesn'"'"'t react with the exposed materials on the surface of the substrate. The fluid is thus used to lubricate the surfaces in contact and to carry any abraded material away from the surface of the substrate. In one aspect, the fluid may be DI water. In one aspect, it may be desirable to add ultrasonic or megasonic agitation to the substrate during the cleaning process to help remove or dislodge material from the surface of the substrate.

Claims

1. A substrate cleaning chamber that is adapted to clean a surface of a substrate, comprising:

a roller that is adapted to rotate a substrate, wherein an axis of rotation of the substrate is generally perpendicular to a processing surface of the substrate;

a cleaning medium having a surface that has a non-uniform profile, wherein the cleaning medium is adapted to provide a non-uniform force to a contact region formed on the processing surface of the substrate; and

a motor that is adapted to rotate the cleaning medium, wherein the axis of rotation of the cleaning medium is generally perpendicular to the axis of rotation of the substrate.

2. The substrate cleaning chamber of claim 1, wherein the non-uniform profile has a region on the cleaning medium surface that is concave in shape.

3. The substrate cleaning chamber of claim 1, wherein the cleaning medium material is selected from a group consisting of polyvinyl alcohol, polyurethane, nylon, and mohair.

4. The substrate cleaning chamber of claim 1, wherein the non-uniform profile comprises:

a mid-region on the cleaning medium surface;

a center region on the cleaning medium surface that protrudes above the mid-region and is adjacent to the mid-region, wherein the center region contacts a point on the processing surface through which the axis of rotation of the substrate passes; and

an edge region on the cleaning medium surface that protrudes above the mid-region and extends from the edge of the processing surface of the substrate to the edge of the mid-region.

5. The substrate cleaning chamber of claim 1, further comprising a second cleaning medium having a surface that is adapted to contact a non-processing surface of the substrate.

6. The substrate cleaning chamber of claim 1, further comprising a first nozzle that is adapted to deliver a fluid to the processing surface of the substrate, wherein the amount of fluid delivered to the processing surface is non-uniform.

7. A substrate cleaning chamber that is adapted to clean a surface of a substrate, comprising:

a roller that is adapted to rotate a substrate, wherein an axis of rotation of the substrate is generally perpendicular to a processing surface of the substrate positioned on the roller;

a cleaning medium assembly that is adapted to remove material from the processing surface of a substrate, wherein the cleaning medium comprises;

a first cleaning medium that is adapted to clean a portion of the processing surface of a substrate; and

a second cleaning medium that is adapted to clean a portion of the processing surface of a substrate, wherein the first cleaning medium has a different material property than the second cleaning medium; and

a motor that is adapted to rotate the cleaning medium, wherein the axis of rotation of the cleaning medium is generally perpendicular to the axis of rotation of the substrate.

8. The substrate cleaning chamber of claim 7, wherein the material property is selected from a group consisting of surface hardness, coefficient of friction, or bulk material density.

9. The substrate cleaning chamber of claim 7, wherein the material from which the first cleaning medium and the second cleaning medium are made is selected from a group consisting of polyvinyl alcohol, polyurethane, nylon, and mohair.

10. The substrate cleaning chamber of claim 7, wherein the cleaning medium assembly has a non-uniform profile that delivers a non-uniform contact force.

11. A substrate cleaning chamber that is adapted to clean a surface of a substrate, comprising:

a roller that is adapted to rotate a substrate, wherein an axis of rotation of the substrate is generally perpendicular to a processing surface of the substrate positioned on the roller;

a cleaning medium that has a uniform profile, wherein the cleaning medium is adapted to deliver a uniform material removal rate across the surface of the substrate due to a non-uniform cleaning medium material thickness across the contact region; and

a motor that is adapted to rotate the cleaning medium, wherein the axis of rotation of the cleaning medium is generally perpendicular to the axis of rotation of the substrate.

12. The substrate cleaning chamber of claim 11, wherein the non-uniform cleaning medium material thickness is thicker near the center of the substrate versus the edge of the substrate.

13. A substrate cleaning chamber that is adapted to clean a surface of a substrate, comprising:

a roller that is adapted to rotate a substrate, wherein an axis of rotation of the substrate is generally perpendicular to a processing surface of the substrate positioned on the roller;

a brush assembly comprising;

a cleaning medium having a surface that has a non-uniform profile, wherein the cleaning medium is adapted to provide a non-uniform force along the radius of the processing surface of the substrate; and

two or more sensors that are coupled to the cleaning medium and are adapted to sense the force applied in different regions of the processing surface of the substrate by the cleaning medium; and

a motor that is adapted to rotate the cleaning medium, wherein the axis of rotation of the cleaning medium is generally perpendicular to the axis of rotation of the substrate;

an actuator coupled to the brush assembly that is adapted to supply a adjustable force to urge the cleaning medium against the processing surface of the substrate; and

a controller adapted to control the force supplied to the cleaning medium by actuator based on input received from the two or more sensors.

14. The substrate cleaning chamber of claim 13, wherein the material property is selected from a group consisting of hardness, coefficient of friction, and bulk material density.

15. The substrate cleaning chamber of claim 13, wherein the cleaning medium is selected from a group consisting of polyvinyl alcohol, polyurethane, nylon, and mohair.

16. A method of cleaning a processing surface of a substrate, comprising:

rotating a substrate at a first rotational speed about an axis that is generally perpendicular to a processing surface of the substrate;

rotating a cleaning medium that has a non-uniform surface profile at a second rotational speed about an axis that is generally perpendicular to the axis of rotation of the substrate; and

urging the cleaning medium having a non-uniform profile against the processing surface of a substrate by use of an actuator, wherein the cleaning medium is adapted to provide a non-uniform force along the radius of the processing surface of the substrate.

17. The method of claim 16, wherein the second rotational speed is about 3 to about 5 times faster than the first rotational speed.

18. A method of cleaning a processing surface of a substrate, comprising:

rotating a substrate at a first rotational speed about an axis that is generally perpendicular to a processing surface of the substrate;

rotating a cleaning medium that has a non-uniform surface profile at a second rotational speed about an axis that is generally perpendicular to the axis of rotation of the substrate, wherein non-uniform surface profile of the cleaning medium has a central region and an edge region;

positioning the substrate so that a point on the processing surface of the substrate through which the axis of rotation passes contacts a point in the central region of the non-uniform profile; and

urging the cleaning medium having a non-uniform profile against the processing surface of a substrate by use of an actuator, wherein the cleaning medium is adapted to provide a non-uniform force along the radius of the processing surface of the substrate.

19. The method of claim 18, wherein the second rotational speed is about 3 to about 5 times faster than the first rotational speed.

20. A method of cleaning a processing surface of a substrate, comprising:

rotating a substrate at a first rotational speed about an axis that is generally perpendicular to a processing surface of the substrate;

rotating a cleaning medium that has a non-uniform surface profile at a second rotational speed about an axis that is generally perpendicular to the axis of rotation of the substrate;

urging the cleaning medium having a non-uniform profile against the processing surface of a substrate by use of an actuator, wherein the actuator and cleaning medium are adapted to provide a non-uniform force along the radius of the processing surface of the substrate;

measuring the force applied to the processing surface of the substrate by the cleaning medium by use of a plurality of sensors coupled to the cleaning medium; and

collecting the measured force from the plurality of sensors and adjusting the force delivered to the processing surface by the cleaning medium by use of a controller that is adapted to control the force supplied by the actuator.