PLASMA PROCESSING METHOD AND APPARATUS, CONTROL PROGRAM AND STORAGE MEDIUM

• US 20070224709A1
• Filed: 03/22/2007
• Published: 09/27/2007
• Est. Priority Date: 03/23/2006
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: OGASAWARA, Masahiro
• Application Number:
  US11/689,840
• Publication Number:
  US 20070224709A1
• Time in Patent Office: Days
• US Class Current: 438/5
• CPC Class Codes: H01J 37/32642 Focus rings

Abstract

A plasma processing method for performing a plasma process by employing a plasma processing apparatus including a processing chamber for performing the plasma process on a target object, a mounting table for mounting thereon the target object in the processing chamber, a peripheral member disposed around a periphery of the mounting table, and a voltage application unit. The voltage application unit applies a voltage to the peripheral member based on an amount of abrasion of the peripheral member, a result of a pre-performed processing or a variation of an electric field formed over the peripheral member.

Claims

1. A plasma processing method for performing a plasma process by employing a plasma processing apparatus, the plasma processing apparatus including a processing chamber for performing the plasma process on a target object, a mounting table for mounting thereon the target object in the processing chamber, a peripheral member disposed around a periphery of the mounting table, and a voltage application unit,

wherein the voltage application unit applies a voltage to the peripheral member based on an amount of abrasion of the peripheral member.

2. The plasma processing method of claim 1, wherein the amount of abrasion of the peripheral member is estimated based on a cumulative usage time of the peripheral member.

3. The plasma processing method of claim 1, wherein the voltage applied to the peripheral member is determined in advance based on a relationship between the amount of abrasion of the peripheral member and variation of an electric field formed over the peripheral member.

6. The plasma processing method of any one of claims 1, 4 and 5, wherein the voltage is applied to the peripheral member to correct the discrepancy between an electric field formed over the target object and the electric field formed over the peripheral member.

7. The plasma processing method of any one of claims 1, 4 and 5, wherein the voltage is applied to the peripheral member such that a thickness of a plasma sheath formed over the peripheral member is thicker than that of a plasma sheath formed over the target object.

8. The plasma processing method of any one of claims 1, 4 and 5, wherein the voltage is applied to the peripheral member to suppress a difference between results processed in a central portion and a peripheral portion of the target object.

9. The plasma processing method of any one of claims 1, 4 and 5, wherein the plasma process is a plasma etching and the voltage is applied to the peripheral member to suppress a difference between etching shapes in a central portion and a peripheral portion of the target object.

10. The plasma processing method of claim 9, wherein the peripheral member is a focus ring.

11. The plasma processing method of any one of claims 1, 4 and 5, wherein the voltage applied to the peripheral member is controlled to be in the range from about 10 V to 500 V.

12. The plasma processing method of any one of claims 1, 4 and 5, wherein the voltage applied to the peripheral member is set at a ground potential.

13. A control program executable on a computer for controlling, when executed, a plasma processing apparatus to perform the plasma etching method claimed in any one of claims 1, 4 and 5.

14. A computer readable storage medium for storing a control program executable on a computer, wherein the control program controls, when executed, a plasma processing apparatus to perform the plasma etching method claimed in any one of claims 1, 4 and 5.

15. A plasma processing apparatus comprising:

a processing chamber for performing a plasma process on a target object;

a mounting table for mounting thereon the target object in the processing chamber;

a peripheral member disposed around a periphery of the mounting table;

a voltage application unit for applying a voltage to the peripheral member; and

a controller for controlling the plasma etching method claimed in claim 1 or 4 to be performed in the processing chamber.

4. A plasma processing method for performing a plasma process by employing a plasma processing apparatus, the plasma processing apparatus including a processing chamber for performing the plasma process on a target object, a mounting table for mounting thereon the target object in the processing chamber, a peripheral member disposed around a periphery of the mounting table, and a voltage application unit,

wherein the voltage application unit applies a voltage to the peripheral member based on a result of a pre-performed plasma process.

5. A plasma processing method for performing a plasma process by employing a plasma processing apparatus, the plasma processing apparatus including a processing chamber for performing the plasma process on a target object, a mounting table for mounting thereon the target object in the processing chamber, a peripheral member disposed around a periphery of the mounting table, a voltage application unit, and a monitoring device for monitoring a state of an electric field formed over the peripheral member,

wherein the monitoring device detects a variation of the electric field formed over the peripheral member, and the voltage application unit applies a voltage to the peripheral member based on the detection result.

16. A plasma processing apparatus comprising:

a processing chamber for performing a plasma process on a target object;

a mounting table for mounting thereon the target object in the processing chamber;

a peripheral member disposed around a periphery of the mounting table;

a voltage application unit for applying a voltage to the peripheral member;

a monitoring device for monitoring a state of an electric field formed over the peripheral member; and

a controller for controlling the plasma etching method claimed in claim 5 to be performed in the processing chamber.