METHODS OF DETECTING AN ABNORMAL OPERATION OF PROCESSING APPARATUS AND SYSTEMS THEREOF
First Claim
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1. A method for detecting abnormal operation of a manufacturing process, comprising the steps of:
- (a) detecting at least one acoustic signal created from a processing apparatus;
(b) transforming the acoustic signal into a frequency spectrum;
(c) comparing the frequency spectrum with a pre-determined frequency spectrum, and(d) generating a signal indicating an abnormal operation of the processing apparatus, if an amplitude of at least one first frequency of the frequency spectrum is substantially different from an amplitude of the same frequency of the pre-determined frequency spectrum.
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Abstract
A method for detecting abnormal operation of a manufacturing process, comprising the steps of: (a) detecting at least one acoustic signal created from a processing apparatus; (b) transforming the acoustic signal into a frequency spectrum; (c) comparing the frequency spectrum with a pre-determined frequency spectrum, and (d) generating a signal indicating an abnormal operation of the processing apparatus, if an amplitude of at least one first frequency of the frequency spectrum is substantially different from an amplitude of the same frequency of the pre-determined frequency spectrum.
25 Citations
20 Claims
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1. A method for detecting abnormal operation of a manufacturing process, comprising the steps of:
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(a) detecting at least one acoustic signal created from a processing apparatus; (b) transforming the acoustic signal into a frequency spectrum; (c) comparing the frequency spectrum with a pre-determined frequency spectrum, and (d) generating a signal indicating an abnormal operation of the processing apparatus, if an amplitude of at least one first frequency of the frequency spectrum is substantially different from an amplitude of the same frequency of the pre-determined frequency spectrum. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for detecting abnormal operation of a semiconductor manufacturing process, comprising the steps of:
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(a) detecting at least one acoustic signal created from a semiconductor processing apparatus; (b) transforming the acoustic signal into a frequency spectrum by Fourier transform; (c) filtering at least one noise from the frequency spectrum; (d) selecting a frequency range from the frequency spectrum; (e) comparing components within the selected frequency range of the frequency spectrum with components in a pre-determined frequency spectrum, and (d) generating a signal indicating an abnormal operation of the processing apparatus, if an amplitude of a first frequency of the frequency spectrum is substantially different from an amplitude of the same frequency of the pre-determined frequency spectrum. - View Dependent Claims (10, 11, 12, 13)
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14. A system for detecting abnormal operation of a manufacturing process, comprising:
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a detector configured to detect at least one acoustic signal created from a processing apparatus and output an electrical signal representative of the acoustic signal; a processor coupled to the detector and configured to transform the electrical signal into a frequency spectrum; and a memory coupled to at least one of the detector and processor, the memory being configured to store the frequency spectrum and a pre-determined frequency spectrum, wherein the processor compares the frequency spectrum with the pre-determined frequency spectrum, and wherein if an amplitude of at least one first frequency of the frequency spectrum is substantially different from an amplitude of a corresponding frequency of the pre-determined frequency spectrum, the processor generates a signal to inform an abnormal operation of the processing apparatus. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification