Semiconductor on glass insulator made using improved hydrogen reduction process

• US 20080057678A1
• Filed: 09/28/2006
• Published: 03/06/2008
• Est. Priority Date: 08/31/2006
• Status: Abandoned Application

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Matthews, Suzanne Marie, Gadkaree, Kishor Purushottam
• Application Number:
  US11/529,652
• Publication Number:
  US 20080057678A1
• Time in Patent Office: Days
• US Class Current: 438/460
• CPC Class Codes: H01L 21/187 by direct bonding
• CPC Class Codes: H01L 21/76254 with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond

Abstract

Methods and apparatus for producing a semiconductor on glass (SiOG) structure include: subjecting an implantation surface of a donor semiconductor wafer to an ion implantation process to create an exfoliation layer of the donor semiconductor wafer; reducing a concentration of hydrogen at least at the implantation surface of the donor semiconductor wafer using ozonated water; bonding the implantation surface of the exfoliation layer to a glass substrate using electrolysis; and separating the exfoliation layer from the donor semiconductor wafer, thereby exposing at least one cleaved surface.

Claims

1. A method of forming a semiconductor on glass structure, comprising:

subjecting an implantation surface of a donor semiconductor wafer to an ion implantation process to create an exfoliation layer of the donor semiconductor wafer; and

reducing a concentration of hydrogen at least at the implantation surface of the donor semiconductor wafer using ozonated water.

2. The method of claim 1, wherein the step of reducing the concentration of hydrogen includes washing the implantation surface in a first solution and then rinsing the implantation surface in the ozonated water.

3. The method of claim 2, wherein the ozonated water is at a concentration of about 5 ppm or greater of ozone.

4. The method of claim 2, wherein the step of washing the implantation surface with ozonated water is carried out for up to about 10 minutes.

5. The method of claim 1, wherein the ozonated water at least partially causes hydrogen groups that have terminated at the implantation surface to oxidize to hydroxyl groups.

6. The method of claim 2, wherein the first solution includes at least one of hydrogen peroxide and ammonia, hydrogen peroxide, and water.

7. The method of claim 6, wherein the first solution includes about one part ammonia, about two to four parts hydrogen peroxide, and about twenty to thirty parts water.

8. The method of claim 2, wherein the first solution is at a temperature of about 20 to 70°

C.

9. The method of claim 2, wherein the step of washing the implantation surface in the first solution is carried out for up to about 10 minutes.

10. The method of claim 2, wherein the step of washing the implantation surface in the first solution is carried out using megasonic or ultrasonic agitation.

11. The method of claim 1, wherein the step of reducing the concentration of hydrogen includes washing the implantation surface in a first solution, then washing the implantation surface in a second solution, and then rinsing the implantation surface in the ozonated water.

12. The method of claim 11, wherein the second solution includes at least one of hydrofluoric acid, hydrochloric acid, and water.

13. The method of claim 12, wherein the second solution includes about one part hydrofluoric acid, one part hydrochloric acid, and 200 parts water.

14. The method of claim 11, wherein the second solution is at a temperature of about 23°

C.

15. The method of claim 11, wherein the step of washing the implantation surface in the first solution is carried out for about 5 minutes.

16. The method of claim 1, wherein the step of reducing the concentration of hydrogen includes subjecting at least the implantation surface to agitation of at least one of the first solution and the ozonated water.

17. The method of claim 16, wherein the agitation includes at least one of stirring the solution, magnetic stirring of the solution, ultrasonic wave propagation within the solution, megasonic wave propagation within the solution, and spray application of the solution.

18. The method of claim 1, further comprising:

bonding the implantation surface of the exfoliation layer to a glass substrate using electrolysis; and

separating the exfoliation layer from the donor semiconductor wafer, thereby exposing at least one cleaved surface.

19. The method of claim 18, wherein the step of bonding includes:

heating at least one of the glass substrate and the semiconductor wafer;

bringing the glass substrate into direct or indirect contact with the semiconductor wafer through the exfoliation layer; and

applying a voltage potential across the glass substrate and the semiconductor wafer to induce the bond.

20. The method of claim 19, wherein the temperature of the glass substrate and the semiconductor wafer are elevated to within about 150 degrees C. of the strain point of the glass substrate.

21. The method of claim 19, wherein the temperatures of the glass substrate and the semiconductor wafer are elevated to different levels.

22. The method of claim 19, wherein the voltage potential across the glass substrate and the semiconductor wafer is between about 100 to 2000 volts.

23. The method of claim 1, wherein the donor semiconductor wafer is taken from the group consisting of:

silicon (Si), germanium-doped silicon (SiGe), silicon carbide (SiC), germanium (Ge), gallium arsenide (GaAs), GaP, and InP.

24. A method of forming a semiconductor on glass structure, comprising:

subjecting an implantation surface of a donor semiconductor wafer to an ion implantation process to create an exfoliation layer of the donor semiconductor wafer;

bonding the implantation surface of the exfoliation layer to a glass substrate using electrolysis; and

separating the exfoliation layer from the donor semiconductor wafer, thereby exposing at least one cleaved surface;

subjecting the cleaved surface to thinning or polishing to produce a post processed surface; and

subjecting the post processed surface to a cleaning process using ozonated water.

25. The method of claim 24, wherein the cleaning process includes washing the post processed surface in a first solution and then rinsing the implantation surface in the ozonated water.

26. The method of claim 24, wherein at least one of:

the ozonated water is at a concentration of about 5 ppm or greater of ozone;

the step of washing the post processed surface with ozonated water is carried out for up to about 10 minutes;

the ozonated water at least partially causes hydrogen groups that have terminated at the post processed surface to oxidize to hydroxyl groups;

the first solution includes at least one of hydrogen peroxide and ammonia, hydrogen peroxide, and water.

27. The method of claim 26, wherein at least one of:

the first solution includes about one part ammonia, about two to four parts hydrogen peroxide, and about twenty to thirty parts water;

the first solution is at a temperature of about 20 to 70°

C.;

the cleaning the post processed surface using the first solution is carried out for up to about 10 minutes; and

the step of the cleaning the post processed surface using the first solution is carried out using megasonic or ultrasonic agitation.

28. The method of claim 24, wherein the step the cleaning the post processed surface includes washing the post processed surface in a first solution, then washing the post processed surface in a second solution, and then rinsing the post processed surface in the ozonated water.

29. The method of claim 28, wherein at least one of:

the second solution includes at least one of hydrofluoric acid, hydrochloric acid, and water; and

the second solution includes about one part hydrofluoric acid, one part hydrochloric acid, and 200 parts water.

30. The method of claim 28, wherein at least one of:

the second solution is at a temperature of about 23°

C.; and

the step of washing the post processed surface in the first solution is carried out for about 5 minutes.

31. The method of claim 24, wherein at least one of:

the cleaning process includes subjecting at least the post processed surface to agitation of at least one of the first solution and the ozonated water; and

the agitation includes at least one of stirring the solution, magnetic stirring of the solution, ultrasonic wave propagation within the solution, megasonic wave propagation within the solution, and spray application of the solution.